Used AMAT / APPLIED MATERIALS Endura 2 #9298227 for sale
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AMAT / APPLIED MATERIALS Endura 2 is a single wafer vertical diffusion furnace (VDF) equipment used for high-temperature diffusion and oxidation of semiconductor wafers. AMAT Endura 2 incorporates innovations in technology, safety, and productivity. It has a 9" diameter, susceptorless chain conveyor designed to hold 300mm wafers. It has two front doors that provide separate atmospheres with independent pressure and temperature control. APPLIED MATERIALS Endura 2 is designed to deliver high-quality process results. It has an integrated auto-gassing system that performs automatic control of the nitrogen/steam or hydrogen/steam mixture for in-situ oxidation. Endura 2 also includes a powerful embedded controller with a touch-screen host computer. This combination enables process engineers to quickly configure and efficiently run multiple recipes simultaneously. AMAT / APPLIED MATERIALS Endura 2 is engineered for safety and reliability. It has several safety features, such as an advanced operator door interlock, and a fail-safe door sensor that stops the unit if the doors are open. The chamber is equipped with a refrigerated coolant machine for fast cooldown and minimal thermal shock. AMAT Endura 2 is highly productive, with a quick changeover between tasks due to its easy-access parts hatches. It has RapidStart technology, which shortens recipe setup times and quickens cycle start. It also has DeepTemperature Control that helps to ensure repeatable process results. This technology enables process engineers to precisely control the temperature and temperature gradient within substrate areas that might be difficult to reach by conventional heating methods. APPLIED MATERIALS Endura 2 is designed to reduce contamination. It has an advanced process bellow and plasma-cleaning capabilities that help to maintain a high level of cleanliness. Endura 2 employs standard precool filling and drain ports as well as secondary ports to help reduce contamination from outside sources. Overall, AMAT / APPLIED MATERIALS Endura 2 is an advanced and reliable VDF tool for high-temperature diffusion and oxidation of semiconductor wafers. It is a productive and safe asset that enables engineers to quickly configure and efficiently run multiple recipes simultaneously. AMAT Endura 2 is also designed with features to reduce contamination.
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