Used AMAT / APPLIED MATERIALS Endura 5500 HP #9093774 for sale

AMAT / APPLIED MATERIALS Endura 5500 HP Reactor is the latest generation of AMAT flagship line of semiconductor etch tools. AMAT Endura 5500 HP Reactor is a high-powered, multi-chamber plasma enhanced chemical-vapor deposition (PECVD) reactor designed for deep sub-micron IC processing. The five-chamber tool is specifically designed to be highly versatile and efficiently process multiple device structures with one process module. APPLIED MATERIALS Endura 5500 HP Reactor offers unprecedented capabilities for processing advanced ultra-within multi-level metallization, contact via interconnects, local interconnects and high density interconnects. The five-chamber tool is equipped with a two-zone/vertically staggered gas delivery system, designed to precisely deliver multiple gases at various rates into different processing chambers. A liquid delivery system is also available for additional process enhancement. Endura 5500 HP Reactor is equipped with seven independently actuated PE-CVD process chambers, with independent temperature, pressure and flow control for each chamber. A digital control system allows for precise customization and control of the process parameters. The tool's high-power ion source enables the processing of extremely thin gate oxides, and enables excellent control of the high throughput of miniscule patterns. In addition, AMAT / APPLIED MATERIALS Endura 5500 HP Reactor incorporates advanced process control and monitoring capabilities, such as online ion source measurements, end-point recipe confirmation, and data integration graphics. These process capabilities, along with wet cleaning capabilities, make the 5500 HP Reactor an ideal tool for efficient processing of complex structures. AMAT Endura 5500 HP Reactor is a powerful, comprehensive tool designed to meet the stringent demands of advanced IC manufacturing. With advanced process capabilities, high throughput, and independent chamber actuation, APPLIED MATERIALS Endura 5500 HP Reactor is an excellent choice for consistent and reliable production of sub-micron structures with complex process requirements.