Used AMAT / APPLIED MATERIALS Endura 5500 VHP #9373208 for sale

AMAT / APPLIED MATERIALS Endura 5500 VHP
ID: 9373208
Wafer Size: 6"
PVD Sputtering system, 6".
AMAT / APPLIED MATERIALS Endura 5500 VHP is a vertical heat processing (VHP) reactor designed for use in device semiconductor manufacturing. This reactor is specifically tailored to meet the increasing requirements of the semiconductor industry, which includes high levels of precision and repeatability. AMAT Endura 5500 VHP is designed to provide power into and high-temperature controlled uniformity out of the reactor's interior. This is done using an array of independently supported, vertically aligned 3000 Series RF sources, which act as both an ion source and a heat source. The 3000 Series RF sources enable the reactor to deliver power to substrates of any reasonable orientation, allowing for fine control over the patterned release of energy. With this ability, APPLIED MATERIALS Endura 5500 VHP can precisely precisely regulate surface temperature and power levels, allowing for both high-temperature and low- energetic solutions. The reactor also has an advanced uniformity control system that enables accurate adjustment of the power distribution. This ensures a uniform energy output across the entire surface to create the desired uniformity and precision. Additionally, the reactor is equipped with a low arcing chamber, which reduces the risk of electrostatic discharge within the chamber. This allows for secure and safe operation. Endura 5500 VHP utilizes the latest thermal processing technology, including inert gas injection and vacuum technology to reduce particles and impurities during etching and deposition. The system is built on an ISO-14644-1 cleanroom standard, so that all of the components within the reactor receive the same level of cleanliness. This ensures a consistent and near perfect environment within the chamber in order to deliver uniform, repeatable results. AMAT / APPLIED MATERIALS Endura 5500 VHP also features exceptional process monitoring capabilities, which enable its operator to view real time temperature and process conditions. Additionally, its user-friendly, graphical user interface makes it easy to configure parameters and select recipes, allowing for successful operation of the device. AMAT Endura 5500 VHP is an advanced vertical heat processing (VHP) reactor designed to meet the high-tech needs of the semiconductor industry. Its array of independently supported, vertical aligned 3000 Series RF sources allow for fine control of substrate heating and power levels, while its low arcing chamber decreases the risk of electrostatic discharge. This reactor is also equipped with an advanced uniformity control system, inert gas injection, vacuum technology and ISO-14644-1 cleanroom standards, to yield consistent and repeatable results. The user-friendly graphical user interface, together with its process monitoring capabilities, make APPLIED MATERIALS Endura 5500 VHP a reliable and secure device for any semiconductor production.
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