Used AMAT / APPLIED MATERIALS Endura 5500 #166249 for sale

Name: AMAT / APPLIED MATERIALS Endura 5500
Brand: AMAT / APPLIED MATERIALS
SKU: 166249
Availability: SoldOut

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Reactors

Manufacturer

AMAT / APPLIED MATERIALS

Model

Endura 5500

ID: 166249

Vintage: 1993

Sputtering system, 8" Wafer size: 8" flat (not notch) Configuration: Chamber 1: AlCu Chamber 2: TiN Chamber 3: Ti Chamber 4: Ti Preheat Etch Clean bench Clamp (not electrostatic chuck) Robot: Buffer: AMAT HP, ceramic blade Transfer: AMAT HP, metal blade System monitor: 1: stand alone 2: through the wall 3: stand alone (1) each monitor rack Load lock: Narrow body with tits in and out No sliding sensor kit Chamber A - Chamber type: Pass through - Chamber Lid: Metal Lid - Cooling method: NA Chamber B - Chamber type: Cool down - Chamber Lid: Metal lid - Cooling method: By PCW Chamber D - Chamber type: Preclean I - Chamber process: - RF Gen/DC power supply1: - RF Gen/DC power supply2: - Turbo pump Chamber F: - Chamber type: Orient/Degas Chamber 1 - Chamber type: Standard body - Chamber process: AlCu, Preheat - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE, MDX-10K SLAVE - RF Gen/DC power supply2: A, MDX-20K MASTER - Chamber pump: CTI CRYO 8F 2phase - Source (Lid) type: P/N 0010-70086 - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Chamber 2 - Chamber type: Wide Body - Chamber process: TiN - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE, MDX-10K MASTER - RF Gen/DC power supply2: N/A - Chamber pump: : CTI CRYO 8F 2phase - Source(Lid) type : UNIDENTIFIED - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Chamber 3 - Chamber type: Wide Body - Chamber process: Ti - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE, MDX-10K MASTER - RF Gen/DC power supply2: N/A - Chamber pump: CTI CRYO 8F 2phase - Source (Lid) type: UNIDENTIFIED - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Chamber 4 - Chamber type: Wide body - Chamber process: Ti, Preheat - Process kit type/items/material: UNKNOWN - RF Gen/DC power supply1: AE MDX-10K MASTER - RF Gen/DC power supply2: N/A - Chamber pump: CTI CRYO 8F 2phase - Source (Lid) type: UNIDENTIFIED - Pedestal type: A101 HEATER, Lifter : P/N 0010-20300 - Process gas: Ar, N2 Includes: - Heat exchanger type: Neslab III 1ea - Compressor type: CTI 8500 2ea - EMO on source cover : No - Shutter : No - SBC : V440 - KSI Shild Treatment DC Power Supply 1ea - AE, MDX-052, SHILD TREATMENT CONTROLLER - COMDEL, CPS-1001 RF POWER SOURCE 60.00Hz - 15V P.S. ASSEMBLY / 24V P.S. ASSEMBLY - 2Board MISC. on MASS STROAGE BOARD Includes pumps Installed 1994 vintage.

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AMAT / APPLIED MATERIALS / AKT Endura 5500 is a plasma etch reactor designed for high precision processing and production of delicate microelectronic components. AKT Endura 5500 is a fully-enclosed equipment consisting of a process chamber, an external vacuum pump and a number of other peripheral components. The system is designed to deliver reliable and consistent process results and ideal for etching, patterning and other precision microelectronic processing needs. AMAT ENDURA 5500's process chamber is an aluminum-domed enclosure lined with ceramic windowed ports to protect the process components within. The reactor uses a variety of gases and energy sources to create and define intricate patterns. Gas cylinders or manifolds can be attached to the chamber, depending on the application, and provide reactive chemistry that interacts with the surface material as directed by a programmable controller. An electromagnetic field generator is also installed to provide the necessary ionic energy for process control. ENDURA 5500 allows for adjustable pressure, flow, and temperature control settings, which are managed by a reactive gas valve and chamber thermocouple. Pressure is maintained by a two-stage external vacuum pump, which is automatically outgassed at startup. This ensures that the process chamber is free of any impurities before production begins. In addition to its controls, AMAT / APPLIED MATERIALS / AKT ENDURA 5500 also offers operators advanced monitoring and diagnostic tools to ensure maximum productivity. These include a real-time data display, pressure monitor and a precision timer that can be set to manage process duration. Additionally, the unit has built-in safety functions such as overpressure and overheat protection. This ensures the highest quality products and efficient production rates. Endura 5500 is well known for its reliability and consistently provides high quality etching results. This makes it an ideal choice for a variety of microelectronic processing needs. Its adjustable controls, diagnostic tools and built-in safety features also ensure that the machine is highly efficient and renders excellent results.