Used AMAT / APPLIED MATERIALS Endura 5500 #293778293 for sale

AMAT / APPLIED MATERIALS / AKT Endura 5500 plasma etch & deposition equipment is a precision, versatile, process-capable parallel plate reactor that enables advanced etch and deposition processes for manufacturing high-performance device structures. Developed specifically for the fabrication of semiconductor, optical & photovoltaic devices, AKT Endura 5500 consists of numerous technologies that offer process flexibility and high definition plasma etch - such as Electron Cyclotron Resonance (ECR) and Plasma Enhanced Chemical Vapor Deposition (PECVD). AMAT ENDURA 5500 is an innovative parallel plate reactor that contains a compact and reliable 800 MHz ECR plasma source, customizable gas boxes, and an advanced remote plasma generator that features integrated process controls to enable direct analysis and optimization of process results. The sophisticated system also contains an advanced electron energization and batch capability, high accuracy process diagnostics and a advanced temperature control unit. The cutting edge parallel plate reactor provides advanced process flexibility, tight temperature control and process uniformity. APPLIED MATERIALS ENDURA 5500 is ideal for soft and hard etching, pattern transfer, photoresist lift-off, and deposition for advanced epitaxial and passivation layers. The unique design of the device allows for variable gas flow, which is utilized for both etch and deposition applications. APPLIED MATERIALS Endura 5500 is also equipped with an in-situ turbomolecular pump to control pressures and process results. The enhanced configuration of the pump allows for larger pressure ranges and provides superior process control and the capability to take advantage of innovative new technologies such as direct dry etching (DDE). In addition, AKT ENDURA 5500 provides robust Levey-Jennings/X-Y monitoring and automated process qualification. With its high-accuracy diagnostics and thermal process tracking, the machine guarantees superior process uniformity. As a result of its innovative design, AMAT / APPLIED MATERIALS / AKT ENDURA 5500 is an ideal choice for precision manufacturing of semiconductor, photovoltaic and MEMS devices. The advanced technologies contained in the tool enable process engineers and technologists to optimize clients' production throughput without compromising quality. Furthermore, the asset's remote plasma generator and automated process qualification provide unparalleled results.