Used AMAT / APPLIED MATERIALS Endura 5500 #293831634 for sale
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AKT/AMAT / APPLIED MATERIALS / AKT Endura 5500 dry etch reactor is a state-of-the-art plasma etch equipment designed to enable rapid and precise processing of even the most complex semiconductor design rules. The system enhances innovation by providing advanced process control with integrated intelligence, offering greater flexibility for challenging etch applications. It has a maximum etching speed of 5500 nm/min and the ability to precisely control all stages of the etch process. AKT Endura 5500's compact design, including its proprietary wafer shape recognition unit, allows it to fit in standard fab space, significantly reducing fab floor space requirements. AMAT ENDURA 5500 is an innovative tool that is designed for scalability for even the most demanding processes. Its advanced etch source technology allows for excellent trim accuracy and immediate etch rate control. With in-situ diagnostics, the machine is able to monitor etch conditions in real time, providing accurate process information to maintain thin film uniformity. In addition, its patented MultiGas? technology allows for rapid gas switching and the ability to etch both o-rings and vias with minimal re-training. The tool's process control and automation capabilities include a multi-zone reaction chamber, auto loading/unloading robot, hot reactive ion etch plume management features, and multiple gas delivery systems. Its comprehensive process control also enables more efficient process optimization, with settings that can be quickly adjusted for changing etch conditions. Moreover, ENDURA 5500 is capable of etching multiple layers simultaneously, allowing for the processing of multiple substrates in a single run. This advanced feature significantly simplifies process set-up and speeds up production time. Additionally, its integrated error handling and advanced process control offer preventive maintenance, reducing unscheduled downtime and potential repair costs. AMAT Endura 5500 dry etch reactor is an outstanding asset for demanding processes. Its advanced capabilities and scalability make it an invaluable tool in etching complex design rules. The model's impressive capabilities enable it to produce high quality results at an economical price, making it especially beneficial to customers whose processes require precision etching.
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