Used AMAT / APPLIED MATERIALS Endura 5500 #9030866 for sale
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ID: 9030866
PVD system, 8"
System software ver: C8.622
System Platform: Endura
Wafer Shape: SNNF
EMO Type: Turn to Release
CE Safety Mark: English
CIM Configuration: SECS
SBC Version: V452
Mainframe Configuration:
Buffer Robot Type: HP
Buffer Robot Blade: Thin Metal
XFER Robot Type: VHP
XFER Robot Blade: Original Metal
Lid Hoist: Yes
Status Light Tower: RYG
Remote Monitor: Table Mount
Sub-System Configuration:
(1) Chiller: Model: None
Cryo Pump Type: CTI Cryo- on board 8F
Cryo Pump Power: 3 Phase
(2) CompressorS
Compressor Type: 9600
Loadlock Configuration:
Loadlock Type: Narrow body
Auto Rotation: Yes
Cassette Type: 8"
Mapping Function: WFM
Vent Type: Variable Speed
Fast Vent Option: Yes
LLKs NB w/Auto Tilt
A Pass-thru
B Cool Down
E O/D (Std)
F O/D (Std)
C PCII w/Cryo Std
D PVD TiN 101
1 PVD Tungsten (W) HT-ESC - Chamber has UV Flash for ESC E-Clean
2 PVD Hot-Al HT-ESC - Source Assy missing, Process kit still intact.
3 PVD Hot-Al HT-ESC - Source Assy missing, Process kit still intact
4 PVD Al/Cu SLT-ESC Complete
5 Iso-Valve (Manual) -
Bfr HP
Txfr VHP (Style Lid)
PVD Hot-Al Chambers: These are Water-Cooled Chamber bodies (can't use for other processes which use Wide-Body Chambers
Gas Information:
Gas Box Pneumatic Valve: Single
Pneumatic Valve Type: Veriflo
Manual Valve Type: Veriflo
MFC Type: FC-780C
Gas Line Out: Out The Back
Modules:
M/F Yes
Sys/AC Yes
EQ1 Yes
EQ2 Yes
Main/AC Yes
AC Dist Box Yes
Cryo Comp 3 - 9600
Heat Ex Yes, Neslab III
Pumps No Pumps included with any tools
Lift Hoist non-AMAT, Gantry & 250lb hoist
Umbilical Configuration:
Controller to Main AC: 50 Feet
Controller to Mainframe: 50 Feet
Mainframe to Generator: 50 Feet
Remote Monitor: 50 Feet
Mainframe to Compressor: 50 Feet
Main AC to pump: 50 Feet
AC Box to Heat Exchanger: 50 Feet
Controller to Gen Rack: 50 Feet
Gen Rack to Gen Rack#2: 50 Feet
Electrical Configuration:
Line Voltage: 200V
Full Load Current: 487A
Remote Transformer: No
Frequency: 60Hz
Missing Parts:
Chamber E: Orientor PCB
Chamber F: Orientor PCB
Chamber 2: Missing upper chamber lid
Chamber 3: Missing upper chamber lid
Chamber C: Missing upper chamber lid
1995 vintage.
AMAT / APPLIED MATERIALS / AKT Endura 5500 is a single wafer processing reactor with advanced functionality for a wide range of semiconductor-processing applications. This intuitively designed reactor is designed to maximize productivity and process flexibility, enabling users to perform non-planar, planar, and complex device structures with superior process capabilities. AKT Endura 5500 is equipped with unmatched thermal capability powered by its advanced tri-zone heating and cooling technology, allowing users to accurately control temperatures for uniform reaction across the entire wafer face. This thermal performance is further equipped by the uniform-flow media injection technology, which provides precise control and homogenous distribution of process gases. As a result, users are able to achieve optimal film profiles with repeatable and consistent performance. Additional features of the reactor include high availability, reduced downtime, and excellent process control. In terms of safety and environmental protection, AMAT ENDURA 5500 meets safety standards such as UL/CSA, with features like the hermetic enclosures to protect personnel from potential exposure to hazardous process materials. Furthermore, the reactor is equipped with advanced diagnostics tools that allow for easy and efficient monitoring, as well as for additional process validation. The reactor also offers improved process uniformity combined with an extended process window compared to conventional thermal processes, allowing for increased flexibility and throughput. Apart from its superior thermal performance, APPLIED MATERIALS ENDURA 5500 provides users with flexible control options, with programmable feed/vent options and advanced I/O configurations that support efficient in-situ process control. Additionally, the reactor utilizes chemical containment and low-flow modes, to enable efficient operation and optimized yields. With its precision motion controllers, users are able to achieve small, but precise motion control with quick calibration, and integration into third party systems is also available. In summary, AMAT / APPLIED MATERIALS / AKT ENDURA 5500 is a powerful, user-friendly, and safe reactor that minimizes waste and overall costs. It offers energy-saving technology, superior thermal performance, reduced downtime and excellent process control, making it an excellent choice for those in the semiconductor industry.
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