Used AMAT / APPLIED MATERIALS Endura 5500 #9112161 for sale
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ID: 9112161
Wafer Size: 6"
Vintage: 1988-2000
PVD System, 6"
Process: STD AL/TiN
Wafer type: SNNF
Buffer robot: HP
Transfer robot: HP
Wide body load lock with auto-tilt in/out
Sliding sensor kit: no
Chambers A/B:
Chamber type: cool down
Chamber lid: metal lid
Cooling method: By PCW / By Gas
Chamber C:
Chamber type: empty
Chamber process: PCII
RF generator / DC power supply 1: LF-10
RF generator / DC power supply 2: CPS-1001
RF generator / DC power supply 3: -
Turbo / cryo pump type: 361C
Chamber D: -
Chamber E: Orient / Degas
Chmaber F: Orient / Degas
Chamber 1:
Chamber type: STD body
Chamber process: TI
RF generator / DC power supply 1: MDX-L18M
RF generator / DC power supply 2: -
RF generator / DC power supply 3: -
Turbo / cryo pump type: cryo pump, 3 Phase
Chambers 2/3:
Chamber type: wide body
Chamber process: TiN, P/N: 0010-21844
RF generator / DC power supply 1: MDX-L12
RF generator / DC power supply 2: -
RF generator / DC power supply 3: -
Turbo / cryo pump type: cryo pump, 3 Phase
Chamber 4:
Chamber type: STD body
Chamber process: TI
RF generator / DC power supply 1: MDX-L18
RF generator / DC power supply 2: -
RF generator / DC power supply 3: -
Turbo / cryo pump type: cryo pump, 3 Phase
1988 - 2000 vintage.
AMAT / APPLIED MATERIALS / AKT Endura 5500 reactor is an ultra-high vacuum equipment designed with the function of processing materials at extreme temperatures in an inert atmosphere. This type of system is used in high-tech research labs and industrial production to produce and process precise products. This specific unit is capable of temperatures up to 2000°C and pressures in ultra-high vacuum ranges. The chamber of AKT Endura 5500 is equipped with multiple access points to insert materials, samples, and feed gas. The machine is designed to reach high throughput rates with minimal degradation of the material being processed. The chamber is made of quartz tubes which allows for UV rays to pass through for surface catalytic reactions or chemisorption studies. The chamber also contains a heated manipulator arm that can accurately move samples around the chamber and be programmed with varying pressure rates and temperatures. AMAT ENDURA 5500 reactor is powered with an advanced multi-zone heating tool. This allows for near diffusionless heating that can quickly switch temperatures between those needed to grow materials such as silicon, boron and indium phosphide. The heating asset is also used with the manipulator arm to move materials between the zones while accurately and quickly heating them. The model is designed with user friendly features including a touch screen, embedded recipes software for quick temperature and program adjustments, as well as safety features such as emergency pressure shut offs. Overall, APPLIED MATERIALS Endura 5500 reactor is an efficient and versatile equipment for processing, manufacturing, and researching materials. With the use of its ultra-high vacuum, advanced temperature capabilities, and multi-zone heating, AMAT / APPLIED MATERIALS / AKT ENDURA 5500 is able to quickly and precisely process a variety of materials with minimal degradation.
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