Used AMAT / APPLIED MATERIALS Endura 5500 #9134810 for sale
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ID: 9134810
Frame
(1) Pre clean chamber only (Ch# C,D) 2Ch
Loadlock Narrow / Auto
Buffer robot HP robot assy / 8" blade pivot assy
Transfer robot HP robot assy / 8" blade pivot assy
Ch#A pass 8" pedestal
8" Base
8" Lift hoop assy
Ch#B Cool 8inch Pedestal
8" Base
8" Manifold
8" Lift hoop assy
Ch#E Orient Degas 8" Orient / Degas assy (Degas lamp module missing)
Ch#F Orient Degas 8" Orient / Degas assy (Degas lamp module missing)
Ch#C PCII:
8" PCll assy
CPS 1001S
Ch#D PCII:
8" PCll assy
(2) 9600 Compressors
(2) 3P AC Controllers
(1) 25ft set of cables
(1) System Rack #1 (Components all Missing)
(1) Gen Rack #1
(1) Edwards QDP40 dry pump
Main AC is missing
1994 vintage.
AMAT / APPLIED MATERIALS / AKT Endura 5500 is a high-powered reactor equipment designed for a wide range of advanced materials processing applications. AKT Endura 5500 features a state-of-the-art design, which allows for high throughput and process flexibility. The system provides the capability of using an RF source to power multiple process chambers simultaneously and can be powered by either LP-GF14 or ICP-GF14 sources. The unit's unique design allows for a high speed of gas distribution and gas flow adjustment. The process chamber is enclosed in a thermally stable vacuum vessel, featuring quartz windows which provide access to the process chamber for wafer, susceptor, and sample inspection during the process. The chamber is lined with CVD-coated ablator material which ensures maximum performance and reliable process control. The chamber can also be fitted with an optional on-board infrared camera to provide real-time monitoring of plane-of-process parameters. AMAT ENDURA 5500 is equipped with an embedded process control software package which allows for easy recipe creation and data logging. Process recipes are designed using a graphical user interface, enabling users to easily visualize the parameters and recipes used for successful deposition rates. AMAT Endura 5500's advanced electronic control also offers superior process repeatability and performance quality. The fast-pulse features allow for rapid sheet resistance and film thickness control, while fine-tune adjustments provide access to specific features such as oxide deposition ratio optimization. The integrated data-logging package stores detailed process data. Additionally, AKT ENDURA 5500 features integrated ion-beam cleaning technology for substrate conditioning, and when combined with the integrated cleaning gas delivery needs, it provides an optimized method for removing contaminants from the wafer prior to process deposition. Endura 5500 is a versatile tool that is suitable for a wide range of advanced materials processing needs. It offers a reliable, high-performance machine with a variety of process-integration capabilities designed to maximize process performance quality and reduce tool complexity. APPLIED MATERIALS ENDURA 5500 is an ideal choice for any advanced materials processing needs.
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