Used AMAT / APPLIED MATERIALS Endura 5500 #9164914 for sale
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ID: 9164914
Vintage: 1996
PVD System
Max system rating: 150KW
(2) Precision chamber
(2) Degases chamber
(2) Deposition chamber
Substrate size: 8"
Throughput: 35" Wafers / Hour
Thickness uniformity: ±2%
1996 vintage.
AKT/AMAT / APPLIED MATERIALS / AKT Endura 5500 is a handloading chemical vapor deposition (CVD) equipment that is designed for a broad range of applications. This system is composed of a vacuum chamber, a high-pressure gas mixing unit, a robotic dispensing machine, and a controller. AKT Endura 5500 is primarily used in the deposition and etching of materials from semiconductor, microelectronic, MEMs, energy, and optical/photonic components. AMAT ENDURA 5500 uses the CVD process to deposit films on substrates. CVD is a process that utilizes a gas phase reaction of material vapor with a substrate to produce a deposited film. This process is commonly used to create semiconductor materials such as metal interconnects, barrier layers, and gate dielectrics. APPLIED MATERIALS Endura 5500 can deposit a wide range of materials including oxides, nitrides, carbides, and metals, among others. AMAT Endura 5500 utilizes a three-stage high-pressure gas mixing tool. This asset allows for precise control of the process gases used in the deposition process. During a typical deposition process, the mixing model is used to move the gas to the substrate surface where the deposition reaction takes place. AMAT / APPLIED MATERIALS / AKT ENDURA 5500 is equipped with a robotic dispensing equipment to move and dispense the process material to the substrate surface. The robotic arm is used to position the material in precise locations for uniform distribution. Endura 5500 also includes several features that support safe operation, such as pressure sensors and an automated safety shutdown feature. APPLIED MATERIALS ENDURA 5500 is controlled by a controller that integrates all the components of the system, allowing operators to monitor and control the process. The controller is compatible with industry-standard software packages, such as MATLAB and LabVIEW, to enable unit integration for advanced process control and automation. Overall, AKT ENDURA 5500 is an advanced CVD machine that is designed for a broad range of applications in materials deposition and etching. This tool is equipped with features that enable precise control of the process and provide for a safe operation. Additionally, ENDURA 5500 is compatible with industry-standard software packages for asset integration and process automation.
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