Used AMAT / APPLIED MATERIALS Endura 5500 #9206635 for sale

AMAT / APPLIED MATERIALS / AKT Endura 5500 is a high-performance reactive ion etcher (RIE) designed for advanced semiconductor processing. This reactor is specifically designed for ultra-high uniformity in surface processing applications, providing uniform and precise depth control. AKT Endura 5500 comprises of a gas cabinet for storing and managing multiple gases, a load lock chamber which is used for rapid substrate loading, the reaction chamber where the etching occurs, and finally the exhaust manifold which lowers the pressure in the chamber before the gases can be released. AMAT ENDURA 5500 utilizes dual-frequency, high-frequency power sources to generate accurate plasma for etching. It also features an advanced plasma source which is designed to produce more uniform etching profiles and less particle contamination. The highly stable plasma source allows for precise control of the doping concentration levels for modern device generations. In addition, AMAT / APPLIED MATERIALS / AKT ENDURA 5500 allows users to select multiple etching recipes to suit different device-stacking architectures. By combining multiple recipes, users are able to comply with a wide range of opera processes. ENDURA 5500 is designed with safety, reliability, and productivity in mind. An integrated monitoring system quickly detects abnormal process conditions and automatically stops the reactor from operating. To ensure safe and reliable operations, the Endura utilizes advanced venting technology to control the chamber pressure. This pressure control is important for providing accurate etch depth control when etching high aspect ratio devices. Furthermore, APPLIED MATERIALS ENDURA 5500 uses a multi-stage turbomolecular pump system to maintain a low base pressure in the chamber. This ensures a low particle background while utilizing a wide range of etching gas mixtures. The sub-micron dust particles produced by the plasma are also collected inside to minimizes the risk of long-term contamination. Finally, Endura 5500 features a dedicated recipe editor software which enables users to easily create and save their own recipes. This allows users to quickly establish processing flows which are tuned to their specific requirements. In conclusion, AKT ENDURA 5500 is an advanced, automated, reactive ion etcher designed for advanced semiconductor processing. Its advanced plasma source provides ultra-high uniformity in surface processing applications, while its multi-stage turbo pump guarantees the lowest possible particle background. Finally, with the dedicated recipe editor software, users can easily create and save their own recipes.