Used AMAT / APPLIED MATERIALS Endura 5500 #9217151 for sale
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ID: 9217151
System
(3) Process chambers
Preclean (CHC)
(2) Degas chambers
(4) Cryo pumps
Parts included:
Qty / Description
(2) / Degas lamps assy
(1) / Ion gauge pump supply
(1) / 24V Power supply
(1) / Relay control board
(2) / ISO / AMP Boards
(2) / 3 Phase cryo controllers
1995 vintage.
AMAT / APPLIED MATERIALS / AKT Endura 5500 is a high-performance reactor designed to handle complex material processing in the semiconductor fabrication process. The 5500 is a highly advanced equipment, capable of performing a variety of processes such as chemical vapor deposition (CVD), atomic layer deposition (ALD), and remote plasma etching (RPE). It provides tight process control for each application, with low pressure, high deposition rates, and excellent uniformity. The 5500 is designed for high production yield and maximum cost efficiency. It uses direct ceramic heating and active pitch control to provide fast heating time and excellent process repeatability. It also has an advanced cooling system, with optimized heat removal from the reaction chamber to prevent thermal damage to the substrate. AKT Endura 5500 also features an integrated RF power unit for inductively coupled plasma applications. This allows for precise control of plasma power, enabling advanced etching processes at reduced power levels and low damage deposition rates. The 5500 is equipped with an advanced handling machine, allowing for fast loading and unloading of substrates, faster cycle times and improved throughput. It also has a comprehensive suite of application capabilities, including etching, deposition, and implantation. The tool has templates for each application, providing safe and repeatable processing with little operator intervention required. AMAT ENDURA 5500 is a powerful and reliable tool for semiconductor fabrication, offering users enhanced yield and cost efficiency. It has superior process repeatability, precise control of plasma parameters, and a range of application capabilities. With its advanced features and reliable performance, the 5500 is an ideal choice for semiconductor processing.
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