Used AMAT / APPLIED MATERIALS Endura 5500 #9257279 for sale
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ID: 9257279
Vintage: 1993
PVD System
Chambers:
(4) PVD chambers (2 TiN and 2 Al)
(2) Degas chambers
(1) Preclean chamber
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MKS Type 627 Pressure transducer
Endura Wafer lift assembly 101 Rev. 003 0010-70271
8" Preclean II RF Match 0010-20524 (Label PN 0060-21140)
Endura Wafer lift assembly preclean 2 Rev. 003, 21902-08
MKS Type 627 Pressure transducer
0010-20277
8" Degas Lamp 350C 0010-20317
8" Degas Lamp 350C 0010-20317
CTI-CRYOGENICS On-Board Module 8113100G001
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Gas Box #1 0010-20217 Rev. B
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Loadlock A (11)
Loadlock B (0620-01049)
Operator Control Panel BD Assy. 0100-20032 Rev. D
ViewSonic E55 Monitor VCDTS21914-2M
Standalone VGA Monitor Base 0010-70386 Rev. A
Gas Box #2 0010-20218 Rev. B
Gen Rack #1
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Gen Rack #2
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Gen Rack #3
ADVANCED ENERGY LF10A
COMDEL RF Power Source CPS-1001S
GRANVILLE-PHILLIPS Ionization gauge supply 332102
15V PS Assembly
24V PS Assembly
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Thornton 200CR
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NESLAB BOM # 327099991701
EBARA A30W
EBARA A70W
HARMONIC GEAR UGH50-28
VEXTA 5-Phase Stepping Motor A4249-9215HG
VEXTA 5-Phase Stepping Motor A4249-9215HG-A1
GEORG FISCHER V 82
Supply voltage: 480 VAC, 3 Phase, 50/60 Hz
Max system rating: 150 kW
Largest load ampere rating: 42 A
Interrupt current: 10,000 Amps IC
1993 vintage.
AMAT / APPLIED MATERIALS / AKT Endura 5500 is a high-end, automated reactor equipment designed for use in the semiconductor industry. The system functions as a versatile production platform, capable of handling a wide range of process tasks. This includes deposition, etching, oxidation, hydrogenation and chemical vapor deposition (CVD). The main frame of AKT Endura 5500 consists of an integrated cleaning chamber, gas module, and temperature controlled sample chamber. The cleaning chamber is used to inactivate the chamber walls before the other processes begin. The gas module provides a uniform supply of helium, nitrogen, argon, and oxygen. The temperature of the sample carrier can be regulated to precise temperatures ranging from 30°C to 400°C. Overall, AMAT ENDURA 5500 is an advanced unit that combines precision, repeatability, and reliability from a single machine. Its Total Process Automation (TPA) enables operators to monitor, control, and document complex processes with a single solution. This is done through its user-friendly Graphical User Interface (GUI) and a proprietary PID control tool. The asset's Process Controller offers a number of process control features such as real-time process monitoring, recipe management, and integrated data logging. Additionally, the model is equipped with process automation capabilities which allow for formula optimization and development of new processes. ENDURA 5500 is built with a high level of repeatability which is needed in order to produce top-quality results. The chamber walls have been made more resistant to contamination so that the same results can be achieved from one session to the next. Endura 5500 is a reliable, high-end reactor equipment optimized for semiconductor production. Its automated processes, process control features, and data logging systems make it an ideal choice for mission-critical industrial needs. With its combination of repeatability, reliability, and process optimization, APPLIED MATERIALS ENDURA 5500 is a true gem in its field.
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