Used AMAT / APPLIED MATERIALS Endura CL #9313580 for sale

AMAT Endura Cluster (CL) reactor is a single-wafer, high-temperature, and high-vacuum process chamber. This innovative capacitor-stabilized inductively-coupled plasma tool is designed for the most challenging manufacturing needs, delivering high process uniformity, productivity, and reliability. AMAT / APPLIED MATERIALS Endura CL reactor utilizes a vertical geometry design to ensure the target wafer is exposed to uniform plasma conditions throughout the entire area, allowing for very tightly controlled process parameters over a large wafer area. The high vacuum environment of the Endura Cluster reactor is crucial in achieving repeatable process results as well as ensuring maximal component life. Low pressure reduces the diffusion of the elements within the system, allows for faster substrate heating and cooling, and absorbs any unwanted particles in the process. The variable pressure and temperature range allow for a variety of different processes, including etch, deposition, strip, ALD, and CVD. AMAT Endura CL uses a patented inductively-coupled plasma source, giving it superior uniformity and stability. The cluster configuration of the electrode design results in a homogeneous plasma current, so the etch rate or deposition rate is even across the entire wafer. The capacitor-stabilized power supply ensures that the current level stays uniform over the entire process, resulting in repeatable performance and excellent yields. When it comes to process control, APPLIED MATERIALS Endura CL delivers outstanding repeatability and high precision. The system's advanced distributed feedback control system ensures that the recipe parameters are followed with high accuracy, resulting in precise and repeatable fabrication results every time. The precision control is further enhanced with the pre-scanned susceptor tilt technology, which minimizes the wafer bow and maximizes substrate coverage, ultimately leading to more uniform processing. Endura CL is the premier choice for a variety of advanced manufacturing needs. Its intelligent and reliable platform makes it the go-to reactor for many demanding applications. The reliable, repeatable, and uniform processes delivered through AMAT / APPLIED MATERIALS Endura CL combine with its smart systems to make it an essential tool in any state-of-the-art production environment.