Used AMAT / APPLIED MATERIALS Endura HP 5500 #293822305 for sale
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ID: 293822305
Wafer Size: 6"
Vintage: 2019
PVD System, 6"
Dual loadloack
Dual transfer chamber & dual on-board 8F cryopumps
Orienter / degas module
Preclean chamber & LEYBOLD TMP361C Turbopump
Chamber 2:
PVD sputter chamber
On-board 8F cryopump
Chamber 3:
Wide body PVD sputter chamber
On-board 8F cryopump
Control cabinet
Generator rack
(2) Advanced energy pinnacle RF generators
(2) CTI-CRYOGENICS 9600 Helium compressors
Motor controller
EDWARDS iXL 1000 Vacuum pump
EDWARDS iXL120 vacuum pump
THERMO FISHER Recirculating chiller
COMDEL CDX-2000 dual RF generator
Power cabinet
Voltage: 208V
Frequency: 60Hz
RPM: 3ph
Currency: 150kVA
2019 vintage.
AMAT / APPLIED MATERIALS Endura HP 5500 is a cutting-edge chemical vapor deposition (CVD) reactor designed specifically for high-volume manufacturing of advanced semiconductor devices. This reactor is a critical tool used in semiconductor fabrication plants to deposit thin films of various materials onto silicon wafers, a key step in the production of integrated circuits. One of the key features of AMAT Endura HP 5500 is its high throughput capability, allowing for efficient processing of large quantities of wafers in a short amount of time. This is achieved through a combination of advanced automation systems, optimized gas flow control, and improved wafer handling mechanisms. The reactor is designed to minimize downtime and maximize productivity, making it an ideal choice for high-volume semiconductor manufacturing facilities. APPLIED MATERIALS Endura HP 5500 is equipped with multiple process chambers, each capable of performing different deposition processes simultaneously. This allows for increased flexibility and efficiency in manufacturing processes, as different types of thin films can be deposited on wafers in parallel. The reactor is also equipped with advanced temperature control systems to ensure precise and uniform heating of the wafers during the deposition process, leading to high-quality film growth and improved device performance. The reactor is designed to handle a wide range of materials, including dielectric films, metal films, and compound semiconductors. This versatility makes Endura HP 5500 suitable for a variety of applications in semiconductor manufacturing, from memory chips to logic devices to power devices. The reactor is also capable of depositing films with varying thicknesses and properties, allowing manufacturers to tailor the process to meet their specific device requirements. In terms of process control, AMAT / APPLIED MATERIALS Endura HP 5500 features advanced monitoring and control systems to ensure precise and reproducible deposition results. The reactor is equipped with real-time metrology tools that allow operators to monitor film thickness, composition, and uniformity during the deposition process. This feedback loop enables process optimization and control, leading to improved film quality and yield. AMAT Endura HP 5500 is also designed with sustainability in mind, featuring energy-efficient components and processes to minimize environmental impact. The reactor is equipped with waste gas abatement systems to reduce emissions of harmful by-products, as well as efficient gas delivery systems to minimize gas consumption. These sustainability features make APPLIED MATERIALS Endura HP 5500 a preferred choice for semiconductor manufacturers looking to reduce their carbon footprint and comply with environmental regulations. Overall, Endura HP 5500 is a state-of-the-art CVD reactor that offers high throughput, flexibility, and precision for high-volume semiconductor manufacturing. Its advanced design, process control capabilities, and sustainability features make it a valuable tool for producing next-generation semiconductor devices with improved performance and reliability.
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