Used AMAT / APPLIED MATERIALS Endura HP #293817409 for sale
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AMAT / APPLIED MATERIALS Endura HP is a commonly used high-vacuum process reactor designed for physical and chemical vapor deposition through an advanced heating process. It is employed in semiconductor manufacturing as a dopant source for metallization layers. AMAT Endura HP contains a reaction chamber with a heatable substrate plate that maintains a temperature uniform within ±5°C of setpoint and a ceramic liner that ensures the uniformity of the deposition process. The ceramic liner is designed using a unique tungsten-diffusion coating to significantly reduce the risk of chemical contamination. To optimize deposition rates and capabilities, APPLIED MATERIALS Endura HP employs a computer-controlled gas blending equipment, ensuring precise and repeatable system control. Endura HP includes an advanced RF power unit that allows for maximum control of the deposition rate and the refractive index. It is designed to support applications such as thin film dielectric coating, film deposition and etching, and atomic layer deposition (ALD). AMAT / APPLIED MATERIALS Endura HP is able to support the use of up to four gasses for deposition processes within its reactor. The gas blending machine is equipped with mass flow controllers to tune and recognize the exact volume of gasses needed for various coating processes. The precise volume and rate of gasses within the reaction chamber can easily be monitored with the unit's built-in pressure gauge tool. AMAT Endura HP also features a custom-built, high resolution electron beam source located within the reaction chamber for direct ion sputtering for additional process options. This electron beam source enables high-speed production with deposition rates of up to 4 nm/s and delivers uniform results across the entire wafer surface. The unit's design also allows for ultra-stable temperature control, with the ability to attain an optimum temperature of up to 1000° C. Due to its automated features and multi-gas capabilities, APPLIED MATERIALS Endura HP is capable of meeting the rigorous demands of semiconductor manufacturing. Endura HP is a powerful and versatile tool that can support metal, dielectric, and semiconductor layer deposition in many advanced semiconductor applications. Its high-precision temperature control, multiple gas-blending capabilities, and sophisticated electron-beam sources bring precise process control that researchers require for the development of revolutionary technologies.
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