Used AMAT / APPLIED MATERIALS Endura II #293587288 for sale

AMAT / APPLIED MATERIALS / AKT Endura II is a fully automated, vertical tube, single-wafer etch/clean reactor designed for precision etching and cleaning of semiconductor wafers. The equipment is designed for use in production of modern semiconductor integrated circuits and other related components. AKT Endura II consists of a centralized controller module and a number of auxiliary components such as a gas box, manifold, transfer module, and exhaust blower. The system is capable of processing various type of substrate materials, such as silicon, glass, metal and plastic. It is equipped with on board process control, monitoring and data acquisition systems. The reactor features a vertical tube design, allowing the workpiece to be processed while in a vertical orientation to minimize gravitational loading. The unit utilizes an open-to-air process chamber design, with a gas box, manifold and transfer module located outside the process chamber. This design ensures flexibility for different gas mixes to optimize etching parameters for different applications. The machine can process both planar and non-planar wafers with uniform etching results. The tool supports the use of a wide range of etchant gasses and chemistries, including SF6 (sulfur hexafluoride), CF4 (tetrafluoromethane) and Cl2 (chlorine). The asset also features an automated centralised wafer transfer model, ensuring repeatability and consistency in wafer handling, and minimizing chance of contamination. It has an integrated exhaust blower to maintain constant process pressures, supply volumes, and to eliminate airborne particles. The integrated thermal control equipment ensures uniform wafer temperature, and optimized for different wafer etching parameters. The integrated process monitor and data acquisition system continuously records etch and clean processes results, allowing real-time optimization of etching and cleaning processes to maintain high product yields. The unit is capable of accommodating a number of optional peripheral components, such as spin-rinse instruments, and mass flow and pressure sensors. AMAT Endura II is designed for both flexible and accurate semiconductor etch and clean applications, making it an ideal option for the production of modern semiconductor ICs and other related components. The machine's combination of vertical tube design, automated centralised transfer tool, and real-time data acquisition and process monitor make it an efficient and reliable tool for the etch and clean needs of semiconductor manufacturers.