Used AMAT / APPLIED MATERIALS Endura II #293616611 for sale
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ID: 293616611
Wafer Size: 12"
Vintage: 2013
System, 12"
Process: Metal
2013 vintage.
AMAT / APPLIED MATERIALS Endura II Reactor is an advanced high-performance fabrication platform designed for lithography, etch, and deposition processes across a variety of applications. With high-quality production capabilities and features such as automated process control and in-situ monitoring, it has been designed for multi-stack high-volume production. AMAT Endura II offers significant advances in throughput, device size, and optoelectronic performance. It is equipped with automated control modules to ensure precise and reliable control of process recipe development and repeatability. The Advanced Photoresist Processing (APR) module allows for sub-10 nanometer lithography and the Substrate Warping Monitor (SWM) module ensures precise temperature and strain control on large wafers. Additionally, the Enhanced In-Situ Monitoring (EIS) system provides advanced in-situ metrology data. APPLIED MATERIALS Endura II is built around an advanced in-vacuum cluster tool architecture. This configuration consists of up to four process modules, each equipped with multiple chambers, in a self-contained unit that requires no additional cabinet space. This increases throughput and reduces maintenance costs while still providing high-quality results. The main chamber of the system is equipped with a wide variety of plasma sources, including radio-frequency (RF) sources, electron cyclotron resonance (ECR) and inductively coupled plasma (ICP) sources, and nanosecond pulses. The plasma sources enable the application of coatings, etching, and cleaning processes to enable the creation of complex and advanced structures. Endura II also boasts an advanced power supply design which integrates a capacitive filter and a linear amplifier to provide a high-voltage and low-ripple power supply. This allows for precise control of the ion beam energy and dose rate for improved non-uniformity, repeatability, and yield. AMAT / APPLIED MATERIALS Endura II is designed for maximum user convenience with a flexibility suite that allows for process recipes, recipes based on complex pre- and post-process data, and the ability to program recipes to run offline. The process data analysis toolset enables thorough post-processing analysis while the hardware control suite allows for specific recipe customization and material control. The system also features a built-in recipe database, wherein users can store and recall recipes to ensure consistent results across different processes. Overall, AMAT Endura II is a powerful and advanced fabrication platform designed for demanding etching, lithography, and deposition processes. With its advanced process control, in-situ monitoring capabilities, and automated recipe control, it provides high-quality results and improved device and pattern sizes. The flexibility suite and hardware control also enable users to optimize their processes to improve accuracy and throughput.
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