Used AMAT / APPLIED MATERIALS Endura II #293624638 for sale
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ID: 293624638
Wafer Size: 12"
Vintage: 2015
Physical Vapor Deposition (PVD) system, 12"
(3) Load ports
BROOKS AUTOMATION GF-125C Controller
FES (CGA) Process unit
SINFONIA FOUP Opener
(2) Process chambers
Mass Flow Controller (MFC):
Ar / 150 SCCM
N2 / 200 SCCM
Ar / 20 SCCM
Unit position / Model / Chemical/Gases
1 and 3 / XLR-W / PAr and PN2
E and F / DMD / PAr
Does not include Hard Disk Drive (HDD)
Chamber-3 missing
Power supplies:
400 / 440 / 480 VAC, 3-Phase
200 / 208 VAC, 3-Phase
2015 vintage.
AMAT / APPLIED MATERIALS Endura II equipment is a chemical vapor deposition (CVD) reactor used in the semiconductor and dielectric film manufacturing industries, providing precise and repeatable process results. AMAT Endura II is a high-performance solution that is reliable, cost-efficient, and can be used in a variety of applications. It has several features, including an intuitive touchscreen user interface, solid heaters for accurate temperature control, a wide variety of installed gas packages with different gas input options, and the ability to adjust the temperature, pressure, and gas flow rate quickly and precisely. Pumped from the gas supplies, the flow of reactant gases is controlled by APPLIED MATERIALS Endura II's precise electronic Mass Flow Controllers (MFCs). MFCs provide precise control of accurately calibrated flow rates for an entire range of reactant gases, enabling precise control of pressure, temperature, and gas concentration inside the reactor. The reactant gases and exhaust gases are lamed through a common exhaust line and RotaFlow Exhaust and Throttling Valves (RFTV) are used to control the exhaust. Endura II utilizes a unique thermal control system that consists of three thermally-isolated zones on the substrate holder substrate. One of these zones, the deposition zone, is used for process temperatures up to 800 C. The other two zones are used for pre-conditioning and cooling the substrate holder before and re- positioning the substrates after the deposition process. AMAT / APPLIED MATERIALS Endura II unit's main chamber is a high-grade stainless steel and is completely isolated from the external environment, eliminating the need for a vacuum machine to maintain high purity throughout the process. To provide precise process control, AMAT Endura II uses an advanced controller and feedback loop that provides real-time monitoring of the process parameters. A variety of sensors are installed on the Endura tool and samples are taken throughout the deposition process, providing data that can be used to adjust the process conditions and maintain a tight control of the process. APPLIED MATERIALS Endura II asset is also equipped with a Venturi scrubber and a Catalytic Oxidizer for purifying the exhaust gases and eliminating process byproducts prior to exhaust. This ensures that no process byproducts or contaminants can escape the model and that the process environment is kept pure. Overall, Endura II equipment is a reliable and reliable CVD deposition tool, which provides precise process results with a maximum level of repeatability. It is equipped with effective control and monitoring systems, and offers a considerable degree of flexibility and adjustability to achieve optimal deposition results.
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