Used AMAT / APPLIED MATERIALS Endura II #293746384 for sale
URL successfully copied!
Tap to zoom
ID: 293746384
Vintage: 2007
PVD System
FI
M/F
CH-1/ CH-2 / CH-3 / CH-E&F
(2) EQ Rack
AC Rack
2nd Rack
DI cooler
(2) Cryo comp
Cryo comp rack
(4) Dry pump
Trance
CB Box
FI Front panel
FI Corner panel
(2) FI Corner panel
Load port bar
(3) Power cable
Power cable / DI Return hose
He hose, DI Return hose
DI Return hose
AC Power cable / Signal cable
AC Power cable
(2) DC Cable
DC, RF Turbo cable
DI Hose, 2"
FI Monitor / Degas gas line
(5) Process kit
Step
OHT WIP Delivery type
Single Axis Aligner Pre alignment and centering
YASKAWA track atmospheric robots
Controller / track atmospheric robots
(3) Load ports
(4) Color configurable light towers
Carrier ID Host interface
Mainframe:
Type: Endura2 gray
Chamber 1-6 : PVD
Chamber A: Path / Cool
Chamber B: Cool
Chamber C: PC
Chamber E and F: SINGLE DEGAS
Viton chamber Slit Valve
Local center finder
XP Robot blade
Chamber1:
0190-22985 Heater
0040-62877,0040-76943 Adaptor
SUMITOMO Cryo pump
Manometer: 0.1 Torr
Gasses: AR 200SCCM, AR 20SCCM, AR 50SCCM
Gauge: Pirani, ION
Chamber2:
0190-22985 Heater
0040-62877,0040-76943 Adaptor
SUMITOMO Cryo pump
Manometer: 0.1 Torr
Gasses: AR 200SCCM, AR 20SCCM, AR 50SCCM
Gauge: 3310-00288 Pirani 0190-48891 ION
Shutter: yes
Chamber3:
0190-27432 Heater
0040-80367 Adaptor
SUMITOMO Cryo pump
Manometer: 0.1 Torr
Gasses: AR 100SCCM, AR 20SCCM
Shutter: yes
Chamber4:
0190-27430 Heater
0040-81104 Adaptor
SUMITOMO Cryo pump
Manometer: 0.1 Torr
Gasses: AR 200SCCM, AR 20SCCM
Gauge: ION
Chamber5:
0190-23068 Heater
0040-81104 Adaptor
SUMITOMO Cryo pump
Manometer: 0.1 Torr
Gasses: AR 200SCCM, AR 20SCCM
Gauge: ION
Chamber6:
0010-22985 Heater
0040-82988 Adaptor
SUMITOMO Cryo pump
Manometer: 0.1 Torr
Gasses: AR 100SCCM, AR 20SCCM
Gauge: ION
Shutter: yes
Chamber A:
DI Cool type
Modified chuck shape
Chamber B:
DI Cool type
Modified chuck shape
Chamber c:
CDX2000 DC PWR SPLY Master
0040-86515 Adaptor
Gasses: AR 20SCCM, AR 200SCCM
Electrical Requirement:
Line frequency: 50Hz/60Hz Generator rack 1
Line voltage: 200/208V/480V Generator rack 2/3
Heat Exchanger / Chiller:
Daikin DI Chiller
Robots:
Buffer and transfer: XP ROBOT
DRY Pumps:
CH: C
Load lock
System
Cryo compressor
1st to 2nd: CSW-610 (420/480V)
2007 vintage.
There are no reviews yet