Used AMAT / APPLIED MATERIALS Endura II #293761335 for sale

AMAT / APPLIED MATERIALS Endura II
ID: 293761335
Wafer Size: 12"
PVD System, 12" Process: RFxT Cu Preclean (2) DMD Encore II TaN.
AMAT / APPLIED MATERIALS / AKT Endura II is a vertical single-wafer epitaxial reactor used for the growth of nanostructures on the surface of semiconductor wafers. It is designed to produce the latest high performance semiconductor devices such as RF and optoelectronic devices. AKT Endura II is composed of a high-vacuum chamber, multiple temperature control zones, powerful centrifugal atomizers for the vaporization of source materials, and a unique reactive gas distribution equipment. AMAT Endura II can accommodate up to six wafers per run, and the process is controlled by a proven closed-loop feedback system. The vacuum chamber is designed to achieve an operating pressure of 1 mbar or lower. The unit is equipped with powerful heating, which can be automatically adjusted throughout the process cycle. The temperature profiles within the zones can be independently set from -100 to 1000°C. It is also equipped with four independent radial RF atomizer sources for the deposition of compounds onto the wafer surfaces. Endura II also has a unique reactive gas distribution machine. The tool comprises of an RF-activated mass-flow-controller, which allows the user to precisely control and adjust the gas pressure to optimize the process. The RF-activated gas valve asset further helps control the pressure gradients and flow dynamics inside the chamber. APPLIED MATERIALS Endura II also comes with a high-end wafer rotation model. The rotational speed can be adjusted from 0-750 rpm and the wafers can be subjected to centrifugal forces of up to 1000 gravitational forces. This allows for complete uniformity of the process across the wafer. Besides these features, AMAT / APPLIED MATERIALS / AKT Endura II also comes with a variety of safety features such as a gas monitoring equipment, cool-down features, and low pressure sensors. Further, they take advantage of smart process architecture that can store and analyse data from multiple wafers for statistical analysis. AKT Endura II is certified for both SEMI Standard S2 and S3 level processes, making it ideal for a wide range of semiconductor device fabrication applications.
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