Used AMAT / APPLIED MATERIALS Endura II #9198082 for sale

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ID: 9198082
Wafer Size: 12"
PVD System, 12" SIP/TI Chamber only SIP.
AMAT / APPLIED MATERIALS / AKT Endura II Reactor is a state-of-the-art production-level chemical vapor deposition equipment designed for the rapid production of high-quality electronic materials. This reactor is capable of commercial-scale production and features the industry-leading Atmospheric Thermal Enclave (ATE) which provides unsurpassed uniformity and superior product yield. The ATE system employs four independent electronic heating zones with precise control over gas, heating, and cooling. This ensures uniform temperatures of up to 120°C and gas flow rates of up to 60 liters per minute (L/min). The ATE unit also has a continuously varying concentration of reactive gases in order to optimize the deposition process, resulting in the highest quality deposition of a wide variety of materials including metals, oxides, and nitrides. AKT Endura II Reactor also features a 3-dimensional end-state profiling. This unique capability uses terraced heater systems with superior uniformity control. This allows the user to set end-state profiles for exact temperature needs with soft ramps down to ambient conditions. For parallel deposition of separate materials, AMAT Endura II reactor also includes up to four mechanical splitters for splitting gas flows between two or more reactors. These provide independent temperature control, allowing the reactor to also produce dozens of different materials in one run. APPLIED MATERIALS Endura II Reactor also features an on-board mass flow control machine which is capable of controlling both inert and reactive flows. This utilizes four high-accuracy mass flow controllers as well as a pressure control valve for trimming the process chamber pressure. The on-board reactant blending tool also allows the user to precisely control the reaction rates of the gases. Endura II Reactor ensures superior particle size distribution control over a range of materials from nano-scale to micron-scale. It features an auto-sampler which automatically collects samples from multiple locations inside the reactor. This allows the user to obtain characterization data on the quality of the material being produced. Overall, AMAT / APPLIED MATERIALS / AKT Endura II Reactor is an advanced, state-of-the-art asset capable of producing a wide range of materials with exceptional quality control at commercial-scale production levels. This model helps ensure that the highest production yields are achieved and that the materials produced meet the highest standards of quality.
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