Used AMAT / APPLIED MATERIALS Endura II #9198255 for sale
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ID: 9198255
Vintage: 2009
PVD System
Process:
W(DC)
TiN(DC)
Si(RF)
Configuration:
Process tool:
FI
(3) Load ports
Endura main frame
Load lock A/B(LLA/LLB)
Degas chamber(CHE)
Versa Ti/TiN chamber (CH1)
Versa W/WN chamber (CH2)
RF PVD Si chamber (CH4)
Sub tools:
Primary AC box / Rack
Power rack:
Power supply
(3) Controllers
(2) Cryo compressors
Cooling chiller (Heat exchanger)
Dry pump (EBARA, 80WN x2, 20N x1)
Sub tools:
Qty / Make / Model / Part number / Description / CH
(6) / BROOKS / CTI-CRYOGENICS / IS 8F / / Cryopump / Buf/Tr/E/1/2/4
(2) / BROOKS / CTI-CRYOGENICS / IS-1000 / 0190-19395 / Cryocompressor / -
(2) / EBARA / ESR 80WN / / Drypump / System/LL
(1) / EBARA / ESR 20N / / Drypump / CHE
(1) / DAIKIN / - / 0190-25358 (Rev02) / Chiller / -
(1) / ADVANCED ENERGY / Pinnacle / 0190-34646W / Power supply 20kW DC / CH1
(1) / OPTIMA / MKS DCG-200Z / 0190-26736101 / Power supply 10kW DC / CH2
(1) / ENI / GHW-12Z / 0190-25529W / Power supply / CH2
(1) / OPTIMA / MKS DCG-200Z / 0190-32405 / Power supply 5kW DC / CH4
(1) / COMDEL / CB3500 / 0190-38882 / Power supply 3500W RF / CH4
(1) / ASSEMBLY / HY-11 / 0010-25739 / Magnet 300MM DS-TTN / CH1
(1) / - / - / 0010-46871 / Magnet assy, 50M,LRW,300MM PVD / CH2
(1) / ASSEMBLY / Magnet / 0010-48649 / Magnet, 300MM, RF PVD / CH4
Parts list:
Chamber-1 process kit:
Qty / Part number / Description / CH
(1) / 0020-91244 / Shield, 1-piece / Versa TTN
(1) / 0020-93555 / Ring, cover / Versa TTN
(1) / 3690-01847 / SCR CAP / Versa TTN
(1) / 0045-00250 / Matched pair / Versa TTN
(1) / 0021-26896 / Disk shutter / Versa TTN
(1) / 0200-05044 / Ring, deposition / Versa TTN
Chamber-2 process kit:
Qty / Part number / Description / CH
(1) / 0021-64644 / Shield, 1-piece / Versa WWN
(1) / 0200-06870 / Ring, deposition / Versa WWN
(1) / 0021-32761 / Ring, cover / Versa WWN
(1) / 0021-26896 / Disk shutter / Versa WWN
Chamber-4 process kit:
Qty / Part number / Description / CH
(1) / 0021-53619 (Rev03) / Shield, 1-piece / RF Si
(1) / 0200-07582 (Rev05) / Ring, deposition / RF Si
(1) / 0021-54932 (Rev04) / Ring, cover / RF Si
(1) / 0021-26896 (Rev03) / Disk shutter / RF Si
(1) / 0020-07884 (Rev02) / Insulator source shield / RF Si
(1) / 0041-25800 (Rev02) / Ring spacer / RF Si
Target:
Qty / Part number / Description / CH
(1) / D0190-23987003 / END TI16.008-1T-0P / Versa TTN
(1) / NMJ-14040801-HL4 / END-W16411-0309T-DB / Versa WWN
(1) / D0190-3376702 / - / RF Si
Endura spare parts:
Chamber-1 process kit:
Qty / Part number / Description / CH
(1) / 0020-91244 / Shield, 1-piece / Versa TTN
(1) / 0020-93555 / Ring, cover / Versa TTN
(1) / 0021-26896 / Disk shutter / Versa TTN
(1) / 0200-05044 / Ring, deposition / Versa TTN
Chamber-2 process kit:
Qty / Part number / Description / CH
(1) / 0021-64644 / Shield, 1-piece / Versa WWN
(1) / 0200-05896 / Ring, deposition / Versa WWN
(1) / 0021-32761 / Ring, cover / Versa WWN
(1) / 0021-26896 / Disk shutter / Versa WWN
Chamber-4 process kit:
Qty / Part number / Description / CH
(1) / 0021-87836 (Rev2) / Straight shield extended 190mm spacing / RF Si
(1) / 0200-08030 / Insulator source shield / RF Si
(1) / 0021-80310 / Cover ring / RF Si
(1) / 0200-12296 / Depo ring / RF Si
(2) / 0021-26896 / Shutter disk / RF Si
(1) / 0041-29007 / Spacer ring / RF Si
(6) / 3690-01929 / SCR CAP SKT HD / RF Si
(6) / 3690-02288 / SCR CAP SKT HD / RF Si
2009 vintage.
AMAT / APPLIED MATERIALS / AKT Endura II will take custom complex reactor engineering to a whole new level. This versatile and powerful platform can handle a wide variety of different processes, enabling our customers to optimize resources and maximize productivity. AKT Endura II delivers a manufacturing system that is perfect for today's factory, with outstanding performance in process complexity, quality, and safety. AMAT Endura II boasts several features that make it stand out from the competition. It features standard components such as a shielding chamber, vacuum source, vacuum pumps, temperature sensor, thermocouples, process gas lines, a gas valve, a controller, and more. Additionally, this platform allows you to customize the configuration to accommodate the unique needs of any advanced process. Furthermore, Endura II meets the high industry standards in terms of cleanliness, contamination control, and heat transfer. This advanced reactor is ideal for many applications in the semiconductor, annealing, reflow, and dielectric coating processes. With respect to semiconductor processes, APPLIED MATERIALS Endura II excels in establishing the essential conditions for device structure formation. It is also adept in device optimization and yield improvement. Furthermore, with its wide range of processable materials and options, AMAT / APPLIED MATERIALS / AKT Endura II can help you optimize your substrate homogeneity, electrical characteristics, and other process requirements. AKT Endura II also excels in annealing processes. It is designed with an efficient method of creating special heating profiles that deliver excellent uniformity throughout the entire machine. This helps to create consistent electrical characteristics and high yields. In addition, AMAT Endura II is beneficial in enhancing the reflow results, providing reliable and smooth heating of furnace elements. Endura II also offers exceptional dielectric coating capabilities. It is engineered with a high-level of precision and accuracy, enabling accurate and repeatable coating of substrate surfaces. It is also adept at creating optimal conditions for surface diffusion and utilization, while avoiding a build-up of excessive film and particle contamination. All in all, APPLIED MATERIALS Endura II is an exceptional reactor solution that can handle a wide variety of processes and deliver reliable and repeatable results. It is ideally configured for today's advanced processes, and capable of delivering industry leading cleanliness, contamination control, and heat transfer. With all of these features, it is clear why AMAT / APPLIED MATERIALS / AKT Endura II is the reactor of choice for many of today's leading semiconductor manufacturers.
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