Used AMAT / APPLIED MATERIALS Endura II #9235244 for sale
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AMAT / APPLIED MATERIALS / AKT Endura II is an integrated, automated, thermal/process reactor designed for research product and device development. AKT Endura II is designed for many different processes, including semiconductor, MEMS, thin film, solar, advanced ceramics, nanowire, and general deposition applications. AMAT Endura II is a full-featured tool for processing at up to 4" wafer sizes. It is also capable of processing with a wide range of materials, including polysilicon, palladium silicide, nickel silicide, boron nitride, etc. The equipment has been designed to offer quick substrate transfer, maximum flexibility, and fast thermal recovery times. APPLIED MATERIALS Endura II can operate with a wide range of inert, reducing, and reactive ambient gases, including argon, nitrogen, ammonia, oxygen, hydrogen, and methane. Endura II is equipped with a high-resolution touchscreen interface, allowing process engineers to access parameters, recipes, and communications systems. The intuitive graphic tools allow for easier parameter management and more efficient process design. The interface is interconnected with Cloud software, allowing access to up-to-date process recipes and SSL parametric recipes. It also features Event Logging and Database Storage, allowing for real-time data compilation and analysis. AMAT / APPLIED MATERIALS / AKT Endura II is designed with an advanced radial susceptor, capable of high-precision radial drive. The susceptor operates on thick-film dynamic process control and a low-pressure unloaded process chamber with an external pressure table. AKT Endura II also features an advanced wafer recognition system with a unique long-life wafer shuttle and gripper mechanism. The unit functions with a 5-L/min liquid nitrogen cooling machine and is capable of operating up to 1200 watts of input power. AMAT Endura II is engineered with advanced safety features, such as redundant gate valves, overpressure shut-off valves, anti-collision protection, and multiple safety interlocks. APPLIED MATERIALS Endura II is equipped with two RF generators, allowing multiple substrate runs without the need for a break. Endura II is a high-performance, cost-effective tool for optimizing processes with improved yields and faster cycle times.
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