Used AMAT / APPLIED MATERIALS Endura II #9236846 for sale

AKT/AMAT / APPLIED MATERIALS / AKT Endura II reactor is a next generation etch processing equipment used in the manufacture of semiconductor devices. It is designed for the efficient removal of materials from a variety of substrates in order to achieve devices with precision features. AKT Endura II is a metal-organic chemical vapor deposition (MOCVD) reactor capable of providing extremely uniform material deposition over large area substrates. Its advanced features include a multi-zone showerhead design that enhances uniformity, a multi-stage heat-up/cool-down equipment, a fast annealing capability, and real-time recipe editing. It also has a variety of process monitoring capabilities including real-time process data and end-of-run data. AMAT Endura II is also equipped with a variety of other deposition and etching systems for precision feature definition. Endura II is specifically designed to provide highly uniform etching of metal oxides and nitrides from a variety of substrates including silicon, indium phosphide, gallium arsenide, sapphire, and other III-V materials. The chamber is designed to transfer heat quickly from the substrate to the gas source. This allows for high etch rates, which in turn leads to high resolution features. APPLIED MATERIALS Endura II is capable of etching both blanket areas and stepped etch features. Its blanket area etch rate is up to 200 nm/min and its step etch rate is up to 400 nm/min. The system is sensitive to the concentration of the etching source and the distance from the substrate. Etching is carried out under high vacuum conditions created by a turbo-molecular vacuum pump. The unit is also equipped with safety features that can be adjusted to customize the etch process. AMAT / APPLIED MATERIALS / AKT Endura II is capable of achieving high quality surface finishes with minimal defects. The etch process also results in minimal vertical sidewall slope and uniform depth. The machine is also highly flexible and has been designed for ease of maintenance and upgrade. Its tools can be applied for a variety of applications including 3-D structuring, micro-machining, and trilayer etching. AKT Endura II also has an outstanding track record of performance and has achieved some of the highest yields in the industry.