Used AMAT / APPLIED MATERIALS Endura II #9274814 for sale
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ID: 9274814
Wafer Size: 12"
Vintage: 2004
MOCVD System, 12"
EFEM
TM
TxZ
(2) PCII
(2) IMP
2004 vintage.
AMAT / APPLIED MATERIALS / AKT Endura II is a state-of-the-art reactor used in the production of advanced materials. It is designed for the production of high throughput, low defect density films and coatings, which can be applied in a range of industrial applications. AKT Endura II is a parallel processing vacuum deposition tool that combines multiple production chambers, source materials, and growth processes, including e-beam, thermal evaporation, and sputtering. It is capable of precise control of deposition rate, oxide thickness, oxide/metal ratios, and optical constant distributions over a wide range of wavelengths and incident angles. In addition, AMAT Endura II uses secondary ion mass spectrometry (SIMS) for process monitoring, and optical spectroscopy for film characterization. It also is equipped with advanced automation, vacuum gauges, digital controllers, and data communication ports. APPLIED MATERIALS Endura II has a 20-chamber cluster capable of handling substrates up to four-inch diameter or up to six-inch diameter with extended fixtures. Endura II reactor boasts a high level of process flexibility and excellent uniformity capabilities; its chamber-to chamber temperature uniformity is of less than ¼ of a degree C, and its deposition rate uniformity is up to six times that of conventional batch evaporators. Moreover, AMAT / APPLIED MATERIALS / AKT Endura II's programmable deposition processes and its capability to encode parameters of individual clusters make specialized process nodes a reality. AKT Endura II provides a wide range of advantages, including a modular design with room for future upgrades, low operating and maintenance costs, and superior cost-efficiency compared to conventional processing systems. Furthermore, its scalable throughput capacity allows AMAT Endura II to meet specific application requirements in terms of number of substrates and total process time. In summary, APPLIED MATERIALS Endura II is a cutting-edge, high throughput reactor that is designed for significant production flexibility and minimal defects. With its industry leading capabilities, Endura II is a reliable and powerful tool for producing advanced materials for a number of industrial applications.
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