Used AMAT / APPLIED MATERIALS Endura II #9379805 for sale
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ID: 9379805
Wafer Size: 12"
Vintage: 2017
PVD System, 12"
Process: RPC
Chamber
2017 vintage.
AMAT / APPLIED MATERIALS / AKT Endura II is a high-performance deposition system used for the fabrication of integrated circuits. This reactor operates within a compact and sophisticated vacuum environment and enables the deposition of a wide range of materials including polysilicon, oxide, aluminum, titanium, and nitride. AKT Endura II reactor has dual sputter sources to ensure optimal deposition properties, making it a suitable platform for advanced device production. AMAT Endura II Reactor has innovative design features that make it a reliable and powerful deposition tool. The reactor features a full chamber enclosure that is nearly hermetically sealed for extreme temperature stability and reduces background contamination. The interior of this reactor has spring-loaded targets and a dual-source, multi-magnet assembly that provides excellent ionization of reactive gases, resulting in uniform, high-density plasma. This deposit uniformity enables efficient and reliable doping of materials with excellent film properties. The optimised magnetron design also minimises sputter contamination by preventing particles from flying back onto the substrate. APPLIED MATERIALS Endura II Reactor also has a number of safety features. The advanced gas rack monitoring system is designed with a triple supply and purge path to ensure proper gas pre-conditioning and admixture. This reduces the risk of blockages, gas leaks, and other potential hazards. The advanced digital controller system provides real-time adjustment of pressure and temperature, ensuring optimal control for sophisticated parameters. This also enables precise control of the total deposition thickness and uniformity. The versatility of Endura II reactor is one of its strongest advantages. The dual-source design and excellent ionization provide excellent deposition uniformity for a variety of materials. This multi-purpose tool is able to perform rapid, multiple source sputter sequences in a single cycle, while its digital controller provides the highest level of control in parameter-based operations. With its multiple safety and performance features, AMAT / APPLIED MATERIALS / AKT Endura II Reactor is one of the most advanced deposition tools in the semiconductor industry.
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