Used AMAT / APPLIED MATERIALS Endura II #9387985 for sale
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AKT/AMAT / APPLIED MATERIALS / AKT Endura II reactor is a state-of-the-art, low-pressure, high-vacuum (LVHV) CVD system designed for advanced reaction processes in the semiconductor manufacturing industry. It is capable of performing a wide variety of complex chemical and physical processes, including thin-film deposition, etching, dielectric deposition, metal contact fabrication, metal/oxide etch selectivity, wafer cleaning, and more. AKT Endura II reactor features an industry-leading, high-precision vacuum system, with the capability to reach up to a base pressure of 2X10-7 Pa. Its robust design is complemented by advanced controllers and sophisticated sensors that ensure precise control of pressure, temperature, gas flow, and other variables for accurate performance of the deposition process. AMAT Endura II reactor uses a large quartz chamber to contain the deposition process. The chamber seals enable efficient extraction of the process gases after the desired reaction has been achieved. Heating elements, built into the walls of the quartz chamber, evenly supply heat to the substrate during the deposition process to ensure uniform thickness and better adhesion. Multiple gas inlets are built into the sidewalls of the quartz chamber to facilitate different material precursors required for the deposition process. This chamber design also helps achieve uniform film deposition even after long deposition cycles. APPLIED MATERIALS Endura II also features multiple pneumatic quenching systems, which shut down the reactor with a sudden blast of air, resulting in end-product quality. In addition, this reactor includes a multi-zone high-precision automated process control system for controlling and monitoring the deposition process and its variables. Finally, Endura II reactor also features high process capability that increases the device yield and the production throughput. With its breadth of features, AMAT / APPLIED MATERIALS / AKT Endura II reactor makes it an ideal tool for the development of advanced materials for the semiconductor industry.
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