Used AMAT / APPLIED MATERIALS Endura VHP PVD #9384072 for sale

AMAT / APPLIED MATERIALS Endura VHP PVD
ID: 9384072
Sputtering systems.
AMAT / APPLIED MATERIALS Endura VHP PVD reactor is a cutting-edge tool for physical vapor deposition (PVD) applications. The reactor is designed to deposit film layers on substrates with superior process uniformity and repeatability. This equipment is an industry-leading process tool that offers reliable PVD film deposition and supports a wide range of deposition technologies. AMAT Endura VHP PVD reactor offers an optimal design in terms of process flexibility, high throughput, and ultra-low particle performance. It utilizes radio frequency (RF) and high-density direct current (DC) power sources to achieve film layers of exceptional uniformity and grid rate over a wide range of substrate materials and sizes. The system includes a next generation design for the chamber, source, substrate holder, and wafer stage for improved thermal and particle performance. In addition, the reactor is equipped with motorized protection features for improved process reliability. APPLIED MATERIALS Endura VHP PVD reactor is also capable of delivering deposition precursors which can be loaded onto the substrate product holder and quickly driven all the way to the reaction chamber. The enhanced motion control and optimized mirror position sensing ensures superior process results. Furthermore, the unit is designed to support commercial, R&D, and pilot-line production applications. Endura VHP PVD reactor has the capability to accurately measure the deposition rates, temperature profiles, and film thickness across the substrate with the help of an integrated diagnostic machine. The tool also supports a wide range of analytical tools which can assist in the real-time monitoring of the deposition process as well as its evolution over time. The asset is designed to be extremely user-friendly, and offers a wide range of recipes and recipe customization capabilities, allowing users to customize the process to their individual needs. Furthermore, the reactor features advanced fault detection and resolution, allowing for the detection of process inconsistencies due to unexpected events and ensuring that any identified inconsistencies are quickly resolved without interrupting the process. Overall, AMAT / APPLIED MATERIALS Endura VHP PVD reactor is a highly reliable, efficient, and customisable physical vapor deposition process tool which offers superior process uniformity and repeatability, optimized motion control and mirror position sensing, as well as integrated diagnostic model for real-time monitoring of the deposition process.
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