Used AMAT / APPLIED MATERIALS ENDURA #177711 for sale
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ID: 177711
Wafer Size: 6"
Vintage: 1995
Sputtering system, 6"
1. STD-AL-Si-Cu (Clamp)
2. Wide-Ti (A101)
3. Wide-Ti (A101)
4. STD-AL-Si-Cu (Clamp)
5. -
A: PASS
B: COOL
C: PC2
D: PC2
E: ORIENTER-DEGAS
F: ORIENTER-DEGAS
BUFFER: HP
XFER: HP
LL: NARROW
MAGNET: DURA & G12
Pumps: EBARA A30W, A10S, A10S
Missing:
FDD
OPT PCB
(4) DIO PCB
Currently installed and shut down
1995 vintage.
AMAT / APPLIED MATERIALS ENDURA Reactor is a highly advanced chemical reactor and mass transfer system designed for the fabrication of leading-edge semiconductor devices. The reactor includes unique features that enable high productivity, high throughput, and low-cost operation in the development, manufacture, and test of various semiconductor devices. AMAT ENDURA Reactor is composed of an enclosure and three main components: a reaction chamber, a chamber enclosure, and a pre- treatment chamber. The reaction chamber provides a controlled environment for chemical processes that enable high-speed production with minimal downtime. It is designed to maintain a controlled, uniform temperature and pressure, as well as control the flow of gas and liquid. The enclosure houses the reaction chamber and pre-treatment chamber, and is pressurized with a combination of nitrogen and oxygen to ensure the optimal environment for the designed process. In addition to its reaction chamber, APPLIED MATERIALS ENDURA Reactor also includes a pre-treatment chamber, which allows for the cleaning and/or treatment of substrates before they enter the reaction chamber. The chamber is comprised of a series of chamber components that include a water ring for water cleaning and cooling; a scrubber for chemical cleaning; a steam box heater for vapor cleaning; a high-temperature furnace for thermal cleaning; and an ozone generator for ozone cleaning. Furthermore, ENDURA Reactor features an enviromax controller, which provides a cost-effective, powerful, and reliable automation and process control system. This microprocessor- based controller offers precision control over the operation of the reactor, allowing for a wide operational range, efficient two-step process operation, high throughput, and quick recipe development. AMAT / APPLIED MATERIALS ENDURA Reactor has been widely adopted in the semiconductor industry due to its unparalleled performance and reliable operation. The advanced features of the reactor provide fast and reliable processing of substrates, while the easy-to-use automation system ensures efficient operation and quick recipe development. Additionally, the reactor is designed for low-cost use and maintenance, making it an attractive choice for applications in cost-sensitive markets.
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