Used AMAT / APPLIED MATERIALS ENDURA #9116853 for sale
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AMAT / APPLIED MATERIALS ENDURA Reactor is an advanced high-throughput metal deposition equipment designed to improve metal deposition rates and improve reproducibility on technologically demanding etchings, substrate placement, and deposition processes. The system enables single or multiple deposition sources, continuous or periodic wafer rotation, and delivers high uniformity and repeatability. AMAT ENDURA Reactor is composed of several components that work together as a unified unit in order to effectively perform the deposition process. These components include a process chamber, end-effector, raised panel loader, cooling fan, accelerometer, multiple deposition sources, and a specialized control unit. The process chamber is the main module of the machine, consisting of a pair of concentric cylinder walls that control pressure, flow and temperature. APPLIED MATERIALS ENDURA end-effector allows wafers to be placed and rotated within the chamber, and is positioned above the lever-operated, low-particle-emission, raised-panel loader that allows for quick and easy substrate loading and unloading. A high-power cooling fan tool, coupled with several temperature sensors, maintains a homogenous temperature distribution throughout the entire process chamber. An advanced accelerometer is used to registering and monitor wafer movements in order to keep a consistent result. In addition, ENDURA Reactor is configurable for multiple deposition sources, for a wide range of alloy types and their deposition, including ruthenium, alloys, gold, aluminum and others. AMAT / APPLIED MATERIALS ENDURA Reactor also offers a wealth of features that make the asset easier to program, reduce unwanted variability, and raise process throughput and uniformity. The interlock feature prevents any interfacing step happening while the wafer is still in-process, while the safety model prevents any accidental opening of the process chamber doors while interlocked. The control equipment allows users to control and plan the entire deposition process with precision and accuracy. An intuitive graphical user interface (GUI) allows users to view, analyze, and modify substrate placements and settings in real-time. The software also enables automated generation of recipe scripts for multiple and complex depositions, for faster and more accurate job execution. In summary, AMAT ENDURA Reactor is an advanced high-throughput metal deposition system designed to automate and improve the efficiency of the deposition process. Its sophisticated components and software make it a reliable, versatile and capable unit that yields improved metal deposition rates and accuracy. This makes the machine ideal for a wide range of metal deposition applications, such as etchings, substrate placement and other deposition processes.
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