Used AMAT / APPLIED MATERIALS ENDURA #9116854 for sale
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AMAT / APPLIED MATERIALS ENDURA is a sophisticated plasma etch reactor used in semi-conductor manufacturing processes. It is designed to provide the highest level of uniformity, productivity and control while maintaining the highest level of precision and accuracy. AMAT ENDURA reactor is used in the etching process, which involves removing materials like oxides and hard masks to create contact openings, trenches and vias. At the heart of APPLIED MATERIALS ENDURA reactor is the Multi-micron Delta equipment, which uses three main technologies to achieve precision etching. First is the Multi-micron Gas Collisions which constantly collides gases in the reaction chamber, allowing them to better react with the samples, leading to improved uniformity. Second is the Multi-micron Magnetron-Enhanced Plasma Source, which uses low power based RF energy to improve uniformity. Lastly, the Multi-micron Inductively Coupled Plasma (ICP) source is used for inductively coupled plasma reactive ion etching processes (ICP-RIE), which provides improved materials selectivity. ENDURA also includes a proprietary recipe optimization system, which automates recipe execution and optimization for maximum productivity. The power supply controls provide users with precise voltage/current/power control and enable them to make adjustments during the etching process to obtain optimal results. AMAT / APPLIED MATERIALS ENDURA reactor also features several process chambers, allowing multiple etching chemistries including fluorine and chlorine at an atomic layer level. One of the main features of AMAT ENDURA is its multi-mode operation, which provides users with two operational modes: process and monitor. In process mode, users can program APPLIED MATERIALS ENDURA to etch samples, while in monitor mode the unit observes samples in-process and records parameters such as pressure, temperature, gas flows, and chamber density. ENDURA also has auto-diagnostic functions that detect process instabilities and alert users, so they can take corrective action. AMAT / APPLIED MATERIALS ENDURA is an advanced etch reactor that provides unparalleled precision and accuracy in semiconductor manufacturing processes. Its combination of innovative technologies and automated optimization systems, Multi-micron Delta machine and the recipe optimization tool empower users to etch smaller and more complex structures with confidence, ensuring higher yields and greater bottom-line profits.
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