Used AMAT / APPLIED MATERIALS ENDURA #9161792 for sale

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ID: 9161792
Wafer Size: 12"
Vintage: 2003
Chamber, 12" Software OS: Windows 2003 vintage.
AMAT / APPLIED MATERIALS ENDURA is a highly efficient, state-of-the-art reactor designed for high speed, high volume production. It is an exceptionally versatile and reliable platform capable of processing wafers as small as 150 mm and as large as 300 mm. AMAT ENDURA employs advanced technologies to ensure the highest quality of processes including advanced wafer mapping, multi-axis wafer alignment, multi-zone temperature control and advanced power control. Through these features APPLIED MATERIALS ENDURA has become the industry leader in high-volume throughput and high-precision process control. ENDURA is made from aerospace grade aluminum and stainless steel components to provide a strong and robust structure. This is coupled with a highly intelligent wafer processing control software which is capable of performing more than 50 different processes during the process such as wafer mapping and alignment, HDTV inspection, oxidation, deposition and etching. With AMAT / APPLIED MATERIALS ENDURA, high-quality silicides and epitaxial steps can be achieved with a high degree of precision. One of AMAT ENDURA's most impressive features is its capacity to provide stable, repeatable results across all substrates. This is achieved through a dual-side of substrate mapping and alignment which guarantees consistent results for both sides of the wafer. Additionally, the wafer movement subsystems feature high-speed DC motors which are capable of very precise and accurate step-and-repeat motions which make processes even more consistent. The advanced thermal verification system helps maintain uniform temperature across the entire process chamber and enables very accurate control of the temperature between different substrates. This helps eliminate any risk of thermal variations induced by the processing steps, resulting in more consistent results. This advanced control system also has a high precision single zone self-adaptive wafer temperature sensor which ensures accurate measurements of wafer temperature during processing. Finally, APPLIED MATERIALS ENDURA also features a comprehensive data logging package which allows users to efficiently review their processing logs. This data logging package features high quality recording resolutions, real-time display of log contents and user-defined logging parameters. This package helps the end user troubleshoot any issues with their processes with ease and accuracy. All in all, ENDURA is a highly efficient and reliable processing platform which features advanced process control technologies that enable user to achieve repeatable high-quality results. It is the ideal choice for high-volume production needs.
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