Used AMAT / APPLIED MATERIALS ENDURA #9167421 for sale
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ID: 9167421
Wafer Size: 12"
PVD Preclean chamber, 12"
Includes:
CTI Cryogenics P300 On-Board cryopump
P/N: 8116250G001 & 8113192G001 Control module
GRANVILLE-PHILLIPS Stabil-ion gauge & 352 gauge controller
AMAT 0010-21748 RF match
Process chems: DI water helium argon nitrogen.
AMAT / APPLIED MATERIALS ENDURA reactor is a tool used in the semiconductor industry for physical vapor deposition (PVD) and chemical vapor deposition (CVD) applications. It provides production-grade throughput with multiple chamber configurations and the ability to perform a variety of depositions. AMAT ENDURA is a self-contained, easy-to-use tool that simplifies operation, improves process outcomes, and reduces downtime while shortening time-to-market. It features an innovative load-lock design that maximizes efficiency, allowing users to transfer substrates between various process zones. The primary benefit of APPLIED MATERIALS ENDURA is its high-performance process head, which is specially designed for next-generation device complex metallization and advanced dielectric applications. This process head is able to handle up to five process steps in a single chamber, making it possible to complete multiple depositions in greatly reduced cycle times. In addition, ENDURA features high-efficiency gas source inlets, offering increased temperature stability in the process chamber. This results in improved wafer uniformity and process repeatability for a more consistent product. With AMAT / APPLIED MATERIALS ENDURA, it is also possible to achieve low defect levels within the same process chamber. This is thanks to its low particle contamination, which is enabled through a patented modular gate-feeding system that ensures only contaminated particles escape. AMAT ENDURA also features a multi-chamber platform, allowing users to choose the right configurations for their specific applications. With multiple configurations available, users can easily customize their setups and perform multiple types of deposition at once, maximizing their process flexibility and enabling them to achieve their desired results quickly. Finally, APPLIED MATERIALS ENDURA is an easy tool to operate. It includes an intuitive touchscreen user interface that simplifies the process of creating recipes and optimizing processes, aiding users in achieving their desired product results quickly and accurately. In summary, ENDURA reactor provides production-grade throughput with various chamber configurations, enabling multiple process steps and depositions in reduced cycle times. It is a high-performance, easy-to-use tool that simplifies operation and reduces process time while achieving repeatable results with low defect levels.
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