Used AMAT / APPLIED MATERIALS ENDURA #9167548 for sale

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ID: 9167548
Preclean II chamber Turbo pump Matching box.
AMAT (APPLIED MATERIALS) AMAT / APPLIED MATERIALS ENDURA is a tool for processing substrates in both research and production environments. This tool is specifically designed for single-wafer and batch-processing applications in semiconductor, advanced packaging, and photovoltaic/solar energy production. This reactor uses a unique continuous wafer transport process that provides enhanced wafer throughput and improved yield performance. AMAT ENDURA is the ideal choice for process. It offers full-wafer processing in the same reactor with throughputs of up to 100 wafers per hour. The tool offers a wide variety of options for various module processing including annealing, oxidation, etching, diamond deposition, ion implantation and so on. The system also offers an automated loading and unloading module with 0.5 second transfer time between modules. APPLIED MATERIALS ENDURA is comprised of the reactor chamber, substrate handler, and multiple processing modules. The reactor chamber has a cylindrical shape with a large area-to-volume ratio, allowing for low-pressure operation and minimal plasma contamination. This makes the system suitable for processing of both single-wafer and batch-processing applications. The substrate handler is designed to provide fast and accurate transfer of the substrates between the loaded cassette and processing modules. ENDURA offers superior process flexibility, repeatability, and reliability. This makes it ideal for advanced R&D tasks as well as mass production. It is equipped with precision control systems and accurate heating systems, meaning the tool can precisely control the process gases and process temperatures. This results in lower deposition rates than are achievable with other deposition systems. AMAT / APPLIED MATERIALS ENDURA is designed to provide reliable processes as it has various redundant process parameters for temperature, pressure, and flow rate measurements. It is also designed with a range of safety features. This includes a surface temperature monitor and over-temperature sensors located in the processing chamber. In terms of performance, AMAT ENDURA is unequalled. This tool offers fast cycle times, superior process repeatability, and high process yields. It also offers the latest in process automation, allowing both single and batch-processing applications. Its versatile design and reliability make it the ideal choice for any substrate processing application.
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