Used AMAT / APPLIED MATERIALS ENDURA #9176602 for sale
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ID: 9176602
Wafer Size: 12"
IMP Ti Chamber, 12"
Includes:
CVD Tin chamber
Preclean chamber
Currently warehoused.
AMAT / APPLIED MATERIALS ENDURA is a reactor designed to deliver applications for advanced materials research over a wide range of temperatures. The equipment is equipped with a uniform-temperature chamber and a wide range of features such as plasma treatment, two furnaces, and a heated zone that provides flat-panel substrates with excellent uniformity at any temperature. It is thus ideal for both rapid thermal processes (RTP) and rapid thermal annealing (RTA) processes. AMAT ENDURA's heated zone is capable of delivering temperatures from 80°C to 1050°C. The uniformity in the heat sources provides uniformity in thermal processing, essential to advanced materials research. The system also incorporates plasma sources, which in turn provide a low-temperature plasma for materials treatment and deposition. APPLIED MATERIALS ENDURA is designed to work with high-sensitivity materials such as indium tin oxide (ITO) and dielectrics, as well as optically active materials like ceramics and diamond. ENDURA unit includes two furnace modules, one with a graphite heating element and one with a silicon carbide (SiC) heating element. The heating elements are both rated for up to 1000°C and are mounted in a vacuum chamber to offer excellent uniformity of heating across the substrate. The furnace modules offer excellent uniformity at higher temperatures, which is crucial for advanced materials research. The machine is fitted with two plasma sources, one for reactive ion etching (RIE) processes and one for chemical vapor deposition (CVD) processes. AMAT / APPLIED MATERIALS ENDURA also features an integrated parametric measurement tool (PMS) that allows lab personnel to monitor the progress of their experiments. The PMS offers current, temperature, and resistance readouts, so that researchers can accurately measure the parameters of their experiments in real time. The PMS also facilitates the extension of the asset's capabilities, allowing for the integration of the latest materials development technologies, such as 3D fabrication or nanotube applications. Overall, AMAT ENDURA is a reliable and powerful reactor and lab solution for advanced materials research and development. Its uniform-temperature chamber and wide range of features, including two furnaces and heated zones, plasma sources, and a parametric measurement model, make it an ideal choice for performing difficult materials processing operations. The equipment is both versatile and reliable, and can provide excellent results in an accelerated timeframe.
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