Used AMAT / APPLIED MATERIALS ENDURA #9198509 for sale
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AMAT / APPLIED MATERIALS ENDURA Reactor (AMAT ENDURA Reactor) is a versatile and reliable tool for the semiconductor industry. It is used in the development of advanced devices for microelectronics, MEMS devices and advanced IC packaging. The reactor is designed to enable high-temperature processes in a robust design that offers increased process control and safety. APPLIED MATERIALS ENDURA Reactor features three standard reactor chambers: a main chamber, a second chamber and a third chamber. The main chamber is optimized for higher temperatures (up to 853°C) and is used for thermal processing. The second chamber is typically used for reactive gases, and has an optional flat-bottomed epitaxy source on the side. The third chamber offers a low-pressure environment for deposition processes such as chemical vapor deposition (CVD) and sputtered film deposition. The reactor is capable of working in many gas mixtures, including standard nitrogen (N2), argon (Ar), helium (He), and hydrogen (H2). It also has the capability to accommodate custom chemistry precursors, allowing for more advanced processes such as chemical gas deposition (CHD). The vacuum level of the reactor can be manipulated with a digital closed loop equipment and a high-precision pressure transducer for verification. ENDURA Reactor also comes equipped with a wafer-handling system, making it easier for customers to accurately place their substrates into the unit. It features a highly accurate wafer gripper using a mechanical machine, allowing for precise and uniform placement of substrates. It also has an expandable input/output interface, providing control over multiple reactors and end-effectors. AMAT / APPLIED MATERIALS ENDURA Reactor is also equipped with an advanced control tool, allowing customers to monitor and change the status of their batch processes in real time. It includes an advanced PID algorithm to ensure precise control of the reaction temperature, timing, and other process parameters. The asset also includes a data acquisition model and the ability to store recipes to maximize the efficiency of process repeatability. Finally, it has a large display that allows customers to monitor the status of the process easily. AMAT ENDURA Reactor is a reliable and versatile tool that is suitable for a variety of processing applications. Its robust design and advanced control systems offer increased process control and safety, allowing for consistent, high-performance results. It is also easy to use and provides customers with the flexibility to optimize their process parameters.
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