Used AMAT / APPLIED MATERIALS ENDURA #9198514 for sale

AMAT / APPLIED MATERIALS ENDURA
ID: 9198514
Degas lift hoop Part number:0040-81707.
AMAT / APPLIED MATERIALS ENDURA reactor is a state-of-the-art thin- film deposition equipment used in the fabrication of advanced semiconductor devices. AMAT ENDURA is an advanced plasma enhanced chemical vapor deposition (PECVD) system that is capable of depositing highly conforming, conformal and stress-controlled thin films. The unit features a multi-chamber design which provides maximum versatility in deposition processes. APPLIED MATERIALS ENDURA machine utilizes a robotic wafer handling tool with a high-speed, vacuum-lock wafer transfer that ensures safe and reliable wafer transport. The asset's wafer carrier benefits from isolated support pedestals for proper wafer centering, individual zone heating control, and an automated calibration procedure for improved uniformity. The model also features an improved Quartz bell design with an integrated deposition source that is configured for higher deposition rate flexibility with low process variability. Additionally, the equipment enables multiple wafers to be processed in a single chamber which boosts throughput and productivity. In terms of process capability, ENDURA enables PECVD deposition of high-quality dielectrics along with specialized resistor, gate, and other materials used in the fabrication of semiconductor devices. The system also has the capability to deposit conformal layers of organometallic and other materials. Additionally, AMAT / APPLIED MATERIALS ENDURA has a high-vacuum Digital Sublimation Chamber (DSC) that is used to perform Sicon purification processes. The unit is capable of performing high temperature anneal (HT) processes to increase material stress or reduce line width roughness (LWR), as well as ALD clean processes to remove organic contaminants on the wafer surface. AMAT ENDURA machine is designed for increased safety with an improved plasma confinement tool that prevents back-spill plasma particles from impacting the chamber and its components. Finally, the asset has multiple sensors and alarms to notify the operators of any model issues in order to ensure optimal safety, performance, and reliability. In conclusion, APPLIED MATERIALS ENDURA reactor is a versatile equipment that is capable of performing deposition and purification processes in a safe and reliable manner. The system is highly versatile and facilitates efficient deposition of thin films and other materials used in the fabrication of semiconductor devices. It also features sensors and alarms to ensure optimal safety, performance and reliability.
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