Used AMAT / APPLIED MATERIALS ENDURA #9198528 for sale

AMAT / APPLIED MATERIALS ENDURA
ID: 9198528
CH3 Wafer lift assies Part number: 0010-03438.
AMAT / APPLIED MATERIALS ENDURA reactor is a versatile deposition tool used extensively in the microelectronics industry to create layers of material that are essential for the manufacture of semiconductors. The equipment is designed for deposition of multiple materials, allowing for quick product changes with minimal process interruption. Additionally, the reactor's advanced design enables it to perform a variety of atom-by-atom deposition processes, from thermal chemical vapor deposition (CVD) to plasma-enhanced CVD (PECVD) to electron cyclotron resonance (ECR) PECVD. AMAT ENDURA reactor is a broad-area deposition chamber, offering uniform deposition over large area substrates. This is made possible by the horizontal reaction tube design, which produces a homogenous flow of reactant gas through out the chamber's entirety. This process is made possible by the unique and innovative substrates positioning system, which allows for easy and accurate positioning of the substrate with minimal operator involvement. The reaction tube is made of graphite with a pyrolitic coating that is designed to optimize thermal transfer and minimizes contamination of the substrate during the deposition process. This is accomplished by having the graphite easily expand or contract with process temperature differences, thus keeping the material uniformity even in temperatures up to 300°C. The chamber's top-mounted showerhead assembly provides uniform reactant gas distribution over the entire area of the substrate. This is done through the formation of a showerhead jet that evenly distributes the reactant gas over the substrate. In addition to the deposition process, APPLIED MATERIALS ENDURA reactor also provides a number of safety and control systems. The unit includes an ultra-low temperature reactant gas source and a low vacuum gas source. This enables the different materials in the semiconductor device to be deposited safely. Additionally, the machine is also equipped with comprehensive and precise logging and alarming systems that provides operators with integral information on the process and material/step instability. Overall, ENDURA reactor is an invaluable tool that is used to create complex, precise layers of material in semiconductor manufacture. Its advanced design provides uniform deposition and minimal contamination, while its safety and control systems ensure that even the most delicate materials are deposited safely with the utmost accuracy.
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