Used AMAT / APPLIED MATERIALS ENDURA #9198534 for sale
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AMAT / APPLIED MATERIALS ENDURA Reactor is a high-temperature plasma processor used in semiconductor and MEMS manufacturing. Designed to provide efficient, cost-effective processing of a wide range of substrates for fabrication of advanced electrical devices, AMAT ENDURA Reactor utilizes state-of-the-art substrate heating and cooling systems as well as deposition and etching systems to deliver both high quality and high productivity. APPLIED MATERIALS ENDURA Reactor's substrate processing chamber is temperature controlled using a number of systems which can accommodate processing of both insulating and conductive substrates. The temperature range from temperatures as low as 200°C to temperatures as high as 1000°C, allowing for tempering, annealing and diffusion driven processes. The reactor chamber is also hermetically sealed with an internal vacuum pressure rating of up to 10-6 torr. This allows for a variety of gas chemistries to be used and enables robust substrate processing ENDURA Reactor also features a plasma generator designed to deliver a wide range of operating temperatures and pressure levels. The plasma generator works in conjunction with a reactive high frequency RF power supply to generate radical and ion species that drive oxidation, etching and deposition. Distributive-ring antennas ensure uniform process coverage over large substrates. AMAT / APPLIED MATERIALS ENDURA Reactor also features sophisticated substrate loading and unloading hardware. This consists of an automated handler system with in-situ cassette loading, enabling the processing of up to three substrates at a time. AMAT ENDURA Reactor is also compatible with a wide range of automated cluster tools, allowing for seamless integration with automated load locks and robots for high speed processing. In addition to its substrate processing performance, APPLIED MATERIALS ENDURA Reactor also includes its own in-situ metrology and feedback system for assessing substrate development in real time. This allows for real time process monitoring and feedback, crucial for producing consistent and high quality results. Overall, ENDURA Reactor is a top-of-the-line system for advanced semiconductor and MEMS fabrication. Its advanced subsystems and features ensure high quality results while its wide compatibility with automated cluster tools ensures efficient and high throughput processing. AMAT / APPLIED MATERIALS ENDURA Reactor is the perfect solution for modern semiconductor and MEMS manufacturing.
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