Used AMAT / APPLIED MATERIALS ENDURA #9198535 for sale

AMAT / APPLIED MATERIALS ENDURA is a reactor (or "reaction chamber") designed for use with a variety of processes, including chemical vapor deposition (CVD), physical vapor deposition (PVD), and plasma-enhanced chemical vapor deposition (PECVD). AMAT ENDURA is composed of a vacuum chamber, a set of electrical feedthroughs and a mass flow controller to control the delivery of gases and other reactants into the equipment. The system has been designed with an emphasis on flexibility, allowing for the use of multiple reactant sources and even different sizes of substrates (within its permissible chamber size). The single-wafer APPLIED MATERIALS ENDURA is capable of creating a uniformity of ~1.5% over a 9-inch substrate and achieves particle counts below 3 counts per second. It features a 70 mm diameter round chamber, a quartz window, and is pressure adjustable up to 500 mbar. Once a process has been established, the parameters such as temperature, pressure and reactant concentration can all be set and adjusted in real time to allow for highly precise control of the wafer deposition process. ENDURA also comes with a wide range of vacuum and temperature components. For example, the unit incorporates an ionizer for purging of reactants, as well as a gas handling machine for the delivery of gases and gaseous mixtures. The tool also features a variable-speed mechanical roughing pump, a turbo-molecular pump, a turbomolecular pump controller and a two-speed roughing pump controller. The asset also comes with a variety of process monitoring and control systems that help ensure uniformity of film deposition. These systems include mass flow controllers for precise control of substrate temperature, a hot-cold plate for sample loading, a split plate for temperature uniformity into the chamber, an optical pyrometer to measure substrate temperature, an interlock switch, and process controllers. As part of its safety features, the model is equipped with over-pressure sensors and an emergency button to quickly stop a process if necessary. This high-tech reaction chamber is a versatile tool that professionals use in advanced processes such as creating nanoscale materials, chemical engineering and quantum technologies. With its robust design, advanced functionality and precise control capabilities, AMAT / APPLIED MATERIALS ENDURA is an invaluable tool for those looking to take their process control to the next level.