Used AMAT / APPLIED MATERIALS ENDURA #9198543 for sale

AMAT / APPLIED MATERIALS ENDURA Reactor is an advanced plasma reactor system designed for critical step processes in the fabrication of advanced semiconductor devices. It is capable of sustaining the highest process temperatures of any existing tool, making it ideal for critical lower temperature and 3D device applications. AMAT ENDURA reactor is made up of several different chambers. The load port is a dedicated area for chamber loading/unloading. It contains the robot, which is responsible for transferring the wafer from the load port to the reaction chamber, as well as servicing other chambers. The base pressure chamber holds the substrate and pump in place during processes, and it also contains temperature control elements and other instrumentation. The reaction chamber is the heart of the reactor and contains the plasma source material and the controller, which is responsible for regulating the process parameters. Finally, the exhaust chamber contains the turbo pumps and inert gas, which are used to regulate the pressure in the system and maintain the desired process conditions. As for the process parameters, APPLIED MATERIALS ENDURA is designed to accommodate a wide range of temperatures, including those as low as 25°C and as high as 1400°C. It is engineered to provide a uniform and clean interface environment, preventing the wafer from being exposed to dielectric deposition or contamination throughout the process. Proactive maintenance is also a key feature, allowing users to set up their recipes before any process to enhance tool performance and maintain high-level repeatability. ENDURA reactor also comes with a wide range of advanced diagnostics and quality checks, including real-time in-situ monitoring of process steps, multiple metrology techniques to characterize etch and deposition results, and crystal tracer technology for monitoring the crystal structure and orientation. Automated optical coherence tomography (OCT) is also an option for AMAT / APPLIED MATERIALS ENDURA, giving users the ability to monitor the device structure at a sub-micron level through the wafer. AMAT ENDURA reactor is an ideal tool for advanced IC fabrication, offering reliable fabrication processes with clean, uniform interfaces and repeatable performance. Its wide temperature range and versatile process utilities make it ideal for a variety of critical steps, such as etch, CVD and PECVD. The comprehensive monitoring capabilities of this system, combined with the proactive maintenance and diagnostics, give users the precision and accuracy they need to succeed in the ever-changing semiconductor industry.