Used AMAT / APPLIED MATERIALS ENDURA #9202812 for sale
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AMAT / APPLIED MATERIALS ENDURA is an advanced etch/deposition platform designed to provide superior production yields, minimal cycle time and superior cost performance. It is a comprehensive, integrated etch/deposition equipment with a wide range of features that enable advanced capabilities and hi-tech applications in substrate manufacturing. This single-wafer deposition/etch reactor offers enhanced throughput, greater process flexibility and higher yield uniformity than competitive etch/deposition tools. AMAT ENDURA system is composed of a two-tank vaporization chamber, a two-segment vacuum chamber, an ultra-low pressure source (ULV), an advanced wafer-loading unit and a process control software suite. The two-tank vaporization chamber houses a custom-designed source material source and the two-segment vacuum chamber contains a powerful RIE/plasma etch module with a high efficiency process range. The ULV pressure source supplies ultra-low pressures for optimal ECR plasma sources performance, allowing for greater etch/deposition capabilities. The advanced wafer-loading machine provides smooth loading/unloading action and safety features to protect the wafer and to ensure consistent results. APPLIED MATERIALS ENDURA tool is designed to perform a variety of etch/deposition processes. It supports a wide range of process applications, including high-aspect ratio feature etch/deposition, nanotechnology applications, dry etching, and thermal treatments. The asset also facilitates integrated process control, allowing for simultaneous process optimization, higher yields and greater reliability. ENDURA model is well-suited for high-throughput production of advanced semiconductor devices. It has an integrated process control equipment with automated recipe generation, recipe generation and parameter tuning, ultra-low pressure operating range, and ability to integrate plasma generators and remote sensors. It also has a custom-designed source material source and a high-efficiency process range. AMAT / APPLIED MATERIALS ENDURA system has been designed with a focus on process repeatability, high production yields and enhanced process flexibility. Its integrated process control software suite provides complete control of the etch/deposition parameters, allowing for improved yields, quick turnaround times and reliable performance. AMAT ENDURA unit can be used in a wide range of applications, including MEMS, optoelectronic devices and RF field device production. The advanced capabilities of the machine enable the reduction of cycle times, improved yields and cost savings for advanced device production.
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