Used AMAT / APPLIED MATERIALS ENDURA #9203800 for sale

AMAT / APPLIED MATERIALS ENDURA
ID: 9203800
Wafer Size: 6"
Vintage: 1999
PVD Chamber, 6" 1999 vintage.
AMAT / APPLIED MATERIALS ENDURA is a versatile, state-of-the-art single wafer or batch reactor designed for semiconductor fabrication and related processing. It is a multi-purpose tool designed for epitaxial growth, deposition, etching, and oxidation applications. The etch, deposition and oxidation processes are all combined in one integrated unit, eliminating the need for multiple process tools. AMAT ENDURA has a high-performance cold wall design for uniform etching and deposition rates in large process loads, plus flexible and easy setup. APPLIED MATERIALS ENDURA is equipped with advanced fault monitoring systems to help prevent potential safety and machine malfunctions. It has a unique modern design with a large area coated showerhead and a spiral inlet tube that distributes uniform gas mixing and flow across the entire workpiece. This makes the device suitable for processes such as epitaxial growth and the deposition of low k films. With a four chamber design to provide flexibility, ENDURA can accommodate a variety of process needs. AMAT / APPLIED MATERIALS ENDURA provides a range of process technology options, such as, rapid thermal process (RTP), remote plasma cleaning, flame annealing and rapid thermal annealing. The device also supports state of the art rapid thermal processing (RTP) and high-temperature annealing (HTA). The fast, high-precision strain-selective annealing and fast-furnace annealing processes are also supported. AMAT ENDURA has a built-in, top-down channeling chamber which enables continuous wafer processing and provides excellent temperature uniformity at high rates and low pressure. APPLIED MATERIALS ENDURA is also equipped with a full range of automation features that allow the user to precisely control the process parameters. This includes automatic and semi-automatic mode, along with full manual control. The user-friendly GUI and data logging capabilities reduce the time for setup and data collection, making this a great option for high volume production and high tech applications. ENDURA is an ideal reactor for process intensification and providing ultra clean die growth. It is designed for maximum process consistency and low particle contamination, making it an excellent tool for advanced semiconductor fabrication.
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