Used AMAT / APPLIED MATERIALS ENDURA #9222234 for sale

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ID: 9222234
Wafer Size: 8"
System, 8" Includes: (2) Chambers OD (2) Chambers TiN (2) Chambers hot Al.
AMAT / APPLIED MATERIALS ENDURA reactor is a versatile, high-performance plasma etching equipment that comes with a range of features and capabilities. It is designed to support etching applications of various types, ranging from ultra-fine photomasks to semiconductor wafers. AMAT ENDURA is capable of producing high-aspect-ratio features with low defectivity and near-perfect etch uniformity across a range of materials. At the heart of APPLIED MATERIALS ENDURA system is the patented ExtorQTM power supply technology: a compact, powerful and versatile RF generator that offers superior performance and unprecedented control of the plasma process. The ExtorQTM power supply gives users single-source control of ion energy, ion density and plasma chemistry, allowing for precise control over etch parameters and minimization of process variability. ENDURA also offers a range of advanced process monitoring and control capabilities. The unit's Control and Analysis Software package includes automatic process optimization tools and experiment design capabilities: tools for setting up wafer processing conditions that are repeatable and highly programmable. The software also supports remote access and monitoring, enabling remote process optimization. AMAT / APPLIED MATERIALS ENDURA reactor also offers a broad range of chamber options, including PE-CD, PE-BT and PE-OD. Each chamber configuration utilizes a variety of magnet configurations and electron cyclotron resonance (ECR) sources. With the addition of AMAT ENDURA APPLIED MATERIALS ENDURA Total Chamber Control (ETCC), users can establish uniform beam patterns, allowing for uniform process results across different chamber types. Furthermore, ENDURA reactor offers a range of automated process recipes, ensuring users process repeatability and increasing throughput. In addition, AMAT / APPLIED MATERIALS ENDURA process chamber features Substrate Management (SM) and Load Lock modules that enable efficient substrate transfer and handling with minimal manual intervention. Overall, AMAT ENDURA reactor is a powerful, feature-rich etching machine that provides robust and reliable processes. With its ExtorQTM power supply, advanced process monitoring, remote accessibility and automated process recipes, APPLIED MATERIALS ENDURA reactor is the ideal choice for users who need precise etch results and tight process control.
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