Used AMAT / APPLIED MATERIALS ENDURA #9296941 for sale

AMAT / APPLIED MATERIALS ENDURA is a physical vapor deposition (PVD) reactor designed to provide deposition and plasma etching capabilities in a single equipment. AMAT ENDURA is designed to provide the highest quality films and best performance in a high-throughput environment. The chamber is constructed from up to five separate components: the substrate holder, high-frequency source, chuck, load lock chamber, and secondary source. The substrate holder allows the system to handle multiple pieces of substrate from any size up to 300mm. The high-frequency source is used to create high power plasma which is used to break up compounds in the process gases. The chuck serves to hold the substrate during the process, while the load lock chamber is designed to reduce contamination by allowing the substrates to be loaded and unloaded without exposure to atmosphere. Finally, the secondary source is used to introduce getters and other compound-containing gas. APPLIED MATERIALS ENDURA's Multi-Zone Control™ Technology provides multiple zones of deposition and etching within the same chamber. This technology allows operators to perfectly match their process requirements to the unit and achieve the highest possible product performance. Multiple film deposition sources, including sputter and plasma sources, can be used on a single substrate, allowing both high-sheet resistance and high-conductance layers. In addition, the machine is capable of etching through a wide range of materials including metals, dielectrics and photoresist. ENDURA is also equipped with a variety of automated features that help to ensure process repeatability and accuracy. Automated parameters such as process time, temperature, and pressure settings can be programmed and saved to ensure that results remain consistent regardless of operator. In addition, the tool has a set of safety features, including pressure controllers and load locks that reduce the amount of risk when operating the asset. Overall, AMAT / APPLIED MATERIALS ENDURA is a powerful physical vapor deposition reactor that offers high-performance and reliable performance in a high-throughput environment. With its Multi-Zone Control™ Technology and automated features, operators can create high-quality films and etchings with unparalleled process repeatability.