Used AMAT / APPLIED MATERIALS Loadlock chamber for P5000 #293658099 for sale

ID: 293658099
AMAT / APPLIED MATERIALS Loadlock chamber for P5000 is a versatile, high-performance reactor designed for a variety of wafer processing and epitaxy applications. Its turbofan-design makes it suitable for both large wafer and small-scale process operations. It is capable of reaching temperatures up to 1000°C and features a thick-film heating technology designed for improved temperature uniformity. The equipment is suitable for ultra-high vacuum or low-pressure applications. The RF microwave sources are mounted in a movable platform for optimal positioning. AMAT Loadlock chamber provides an efficient and cost-effective solution for substrate preparation requirements. It is designed for non-inert gas applications and allows for optimal control of the gas environment and pressure. The P5000 chamber features a multi-zone linear stage - equipped with three (3) Eurorack linear actuators for independent motion of substrate or target positions - as well as a software interface for precise control of all process parameters. The chamber also offers an additional positioner for rotating substrates to keep them in the processing area. APPLIED MATERIALS P5000 Loadlock chamber has many useful features and accessories, such as a sensor bar for thermal 1/4-ft measurement, an active electron-beam deposition unit, a UV irradiation source and an ion-beam sputter deflector. The system also includes a load-lock type transfer chamber, a multi-axis separation sealer and a Faraday shield for accurate wafer exposure. Additionally, the chamber can be integrated with a variety of advanced diagnostic tools, such as a live-cell imaging unit, an optical emission spectrometer or a Raman spectrometer, as well as a 3D profiler. The machine is capable of supporting a wide range of substrate sizes and thicknesses. It is equipped with an ultra-high accuracy motion control electronics and has the ability to store up to 25 manual parameters for easy setup and calibration of the working parameters. AMAT / APPLIED MATERIALS P5000 Loadlock chamber offers a reliable, precise and repeatable process operation for any type of substrate preparation.
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