Used AMAT / APPLIED MATERIALS P5000 Mark II #9097285 for sale
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ID: 9097285
Wafer Size: 8"
PECVD SiN system, 8"
(4) Chambers: PECVD SiN, lamp heated
Robot: Phase III
Robot blade assy: missing
TTW Config
Elevator: 15-slot
Egormica loader: optional
Phase 4 matches on each chamber
VME: 21-slot
Heat exchanger: AMAT-0.
AMAT / APPLIED MATERIALS P5000 Mark II reactor is a type of deposition tool used in the manufacture of integrated circuit (IC) chips. This tool is essential in the creation of modern semiconductor materials. It is used to apply thin films of material onto a substrate, allowing complex structuring that is needed to create tiny transistors and interconnects. This makes it a key part of the fabrication process for IC chips. AMAT P5000 Mark II is based on the P5000 tool platform and provides advanced process capability for demanding applications. It has an overall footprint width of 64 inches, with a 76-inch-wide base. The base can support up to four work cells, allowing for multiple processes to be undertaken simultaneously. Each of the cells is equipped with a 50 centimeter by 30 centimeter quartz liner, capable of withstanding temperatures up to 1000°C and pressures up to 5 Torr. The cells are adjustable, and can be attached to various sources such as evaporation, sputtering, or ion doping sources. The system is also equipped with a wide range of sensors, such as pressure and temperature detection, as well as an integrated viewing area. This allows the user to monitor process parameters closely to ensure the best possible results are achieved. Furthermore, APPLIED MATERIALS P 5000 MARK II uses an open communications architecture, allowing it to be integrated with a wide range of automation systems. APPLIED MATERIALS P5000 Mark II also has alternative configurations available, such as the P5000EO version, which is Carbon Dioxide laser enabled for laser ablation processing. In addition, the P5000TI version has the capability to use matched pair crucibles for added temperature control, as well as an aircraft-grade aluminum liner for improved temperature uniformity. All of these features make P5000 Mark II a versatile and reliable tool for advanced IC fabrication.
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