Used AMAT / APPLIED MATERIALS P5000 Mark II #9210742 for sale
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AMAT / APPLIED MATERIALS P5000 Mark II is a semiconductor processing reactor designed for 200mm wafer fabrication. It uses an infrared heaters which enables rapid thermal cycling at high temperature for a variety of processes including annealing, oxidation and deposition. The chamber is configured with two split-zones and chambers, enabling independent temperature control in both zones. The modular design offers continuity from one process to the next, allowing easy integration and process optimization. The Mark II also has the option of a high aspect ratio etch chamber. The Mark II uses chamber pressure control with a total system pressure and temperature control of 1000-5000 Torr. The process chemistry is delivered through dual-plasma source, in-situ exhaust plasma, and gas chemistry management. The controller includes a built in diagnostics system to ensure the highest quality results and reproducibility. The Mark II incorporates a variety of hardware and software advances, including the RF Generator for multi-frequency control, Auto Tune for temperature and pressure stability, intelligent Conductor for temperature drift compensation, and Intelligent Electrode for better RF Efficiency. This allows the Mark II to achieve higher yields, tighter process tolerances, and improved thermal uniformity. The software included with the Mark II also provides advanced features, including Process Workflow monitoring, Recipe Scheduling, and Parameter optimization. Finally, the Mark II has an integral triple-axis robot, allowing easy loading and unloading of wafers. AMAT has designed the Mark II to be an economical and efficient option for 200mm wafer fabrication. With its advanced features and reliable performance, AMAT P5000 Mark II is an ideal choice for semiconductor processing.
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