Used AMAT / APPLIED MATERIALS P5000 Mark II #9313058 for sale
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ID: 9313058
Wafer Size: 8"
CVD System, 8"
Gas panel facilities: Top feed multi-line
Gas panel exhaust: Top feed
Robot blade: Metal
Wafer type: Notch
Gas panel type: Version 4 hot box
Liquid source: Hot box
(3) TEOS Sources: Heated ampoule
EMO's: Momentary
Gas lines: (12) Lines
Robot type: Standard
System umbilicals: 25ft
MF Facilities: Rear
Mainframe: Phase II
Load lock slit valves: Chemrez
Heat exchanger 1: AMAT 0
VME Rack: Extended 21-slots
Hard Disk Drive (HDD): 4.5 GB
Chamber A:
Type: CVD Universal
Process A: BPSG TEOS
Lid type: Single gas feed-thru
Susceptor / Pedestal: TEOS
Heater / Cathode cooling: AMAT 0
Process kit type: Undoped TEPO
Slit valve O-ring: Chemraz
Chamber O-rings: Chemraz
HF Generator: OEM 12 B
RF Match: Phase 4 CVD
Dual manometer:
Manometer 1: 10 Torr
Manometer 2: 100 Torr
Chamber A gasses:
Gas / MFC Size / Gas name / MFC Type
Gas 1 / 4 Slm / N2 / UNIT 1661
Gas 2 / 2 Slm / O2 / UNIT 1661
Gas 3 / 3 Slm / C2F6 / UNIT 1661
Gas 4 / 1.5 Slm / He / UNIT 1661
Remote 1:
LFC Size / Liquid name / LFC Type / Gas stick
3 Slm / TEOS / UNIT 9660 / Nupro
Chamber B:
Type: CVD Universal
Chamber process: PRSP
Lid type: Single gas feed thru
Susceptor / Pedestal: TEOS
Heater / Cathode cooling: Steel head 0
Slit valve O-ring: Chemraz
Chamber O-rings: Chemraz
HF Generator: OEM 12 B
RF Match: Phase 4 CVD
Process kit type undoped TEOS
Dual manometer:
Manometer 1: 10 Torr
Manometer 2: 20 Torr
Chamber B gasses:
Gas / MFC Size / Gas name / MFC Type
Gas 1 / 5 Slm / N2 / UNIT 1661
Gas 2 / 3 Slm / O2 / UNIT 1661
Gas 3 / 2 Slm / C2F6 / UNIT 1661
Gas 4 / 1.5 Slm / He / UNIT 1661
Remote 1:
LFC Size / Liquid name / LFC Type / Gas stick
3 Slm / TEOS / UNIT 9660 / Nupro
Missing parts:
Mini SBC board
SBC Board
A/I
(3) DI/O
Hot box components
Gas box gas interface PCB
Power supply: 208 VAC. 400 Amp, 50 Hz Transformer.
AMAT / APPLIED MATERIALS P5000 Mark II is a cutting-edge technology-based processing reactor used for various etching, thin-film deposition and heat-treatment processes. It has a chamber volume capacity of up to 5 liters and a maximum operating temperature of 950 degrees Celsius. AMAT P5000 Mark II is constructed with a robust stainless steel architecture and features a hermetic design with a flat-plane top that facilitates long-term heat-transfer efficiency. The unit also has integrated temperature control, part storage and automated cleaning capabilities that allows for high-volume production. Its programmable cycle control capability also allows operators to easily change parameters to optimize process conditions for maximum efficiency. APPLIED MATERIALS P 5000 MARK II can be customized to accommodate various types of liquids, gases, and solids for its various processes. It can be used for chemical vapor deposition (CVD), physical vapor deposition (PVD), photo-grade chemical etching, and directional etching, as well as for heat treatment. The temperature of APPLIED MATERIALS P5000 Mark II is also adjustable from room temperature to 950 degrees Celsius in intervals of 10 degrees, allowing for process consistency across batches. It is also equipped with a built-in safety device to prevent any hazardous event such as gas buildup or leaks. In addition, P 5000 MARK II can be combined with AMAT proprietary processing gases in order to maximize product performance and increase the reliability of the system. This reactor also features an intuitive touchscreen interface, allowing operators to quickly and easily access the controls. For additional safety and process control, P5000 Mark II has a built-in data logging feature that tracks operational parameters, enables remote diagnostics, and sends out alarms when parameters are outside of preset limits. With its advanced features, AMAT P 5000 MARK II is an excellent choice for aerospace, automotive, medical device, and advanced industrial applications.
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